Semilab is proud to release LEI-2000M and LEI-2000RS; two new additions to the LEI product series (previously referred to as Lehighton), to further strengthen the semiconductor device manufacturers’ critical need to know the uniformity of mobility and resistivity.
Due to the growing need for environmentally conscious practices in the semiconductor industry, we engineered our new product line with a strong focus on sustainability. Affordability and space optimization were our main factors while developing the new LEI-2000M and LEI-2000RS, surpassing their predecessors in footprint reduction. Both metrology solutions are non-contact and non-destructive measurement methods, capable of factory automation fulfilling industrial standards by semi-automated wafer handling capability and SAM2™ (Semilab Automation Manager 2) based software.
LEI-2000M is designed for the characterization of charge carrier mobility and sheet resistance, while LEI-2000RS provides sheet resistance characterization of compound semiconductors with high resistivity substrates on the entire surface up to 200 mm sample sizes.
Contact us to find the best metrology solution for your metrology needs!