µSE-2300 Microspot Spectroscopic Ellipsometer

The Semilab Spectroscopic Ellipsometer is an ideal tool particularly for applications involving materials such as SiC/GaN (used in power electronics), GaAs (for photonics applications), or SiGe structures. The device provides exceptional accuracy in analyzing the optical properties of these materials, including layer thickness, refractive index, and thin-film quality. Optimized for 200 mm technology processes, the ellipsometer allows for fine-tuning of manufacturing parameters and quality control, supporting the development of high-performance and reliable devices.

Key Features and Benefits:

• Drop-in replacement, 200 mm dedicated platform and requirements
• Recipe transfer, and compatibility with current installations
• Flexible wafer size handling (75mm, 100mm, 150mm, 200mm)
• Several kinds of material handling (Si, SiC, Glass)
• Open cassette, SMIF load port configurable, capable for OHT/AGV
• 40 Years of Ellipsometry history
• Worldwide coverage for service and application

Standard Features:

• High reliability and precision dual arm robot
• Optical pre-aligner, transparent wafer handling supported
• Selectable Load port option (dual SMIF or Open cassette)
• High speed and accuracy X-Y-Z stage
• Mini environment modules included (with temperature and humidity sensor and FFU with ULPA filter and temperature regulation)
• Rotating compensator Ellipsometer with microspot
• Fast auto focusing
• Pattern recognition
• Dedicated Acquisition (SAM2) and Analysis (SEA) software

Optional Features:

• AGV and OHT Compatibility
• Cassette ID readers
• WaferID readers (top/bottom)
• Light tower customization
• Ionizer option
• AMC filters
• Rotating Compensator Ellipsometer DUV
• Rotating Compensator Ellipsometer NIR
• Spectroscopic Reflectometer VIS
• Spectroscopic Reflectometer NIR
• Bow/Warp metrology option
• Global Stress metrology calculation
• GEM/SECS protocol