In order to keep the thin film solar cell production stable, the adequate control of the layer deposition and treatment processes is crucial. Semilab offers several metrology solutions for the characterization of electrical and optical properties of the thin layers.
Our special design Four-Point-Probe and Eddy Current sensors provide accurate measurement of the sheet resistance of thin semiconductor, TCO or even metal layers in the total range of interest.
Using Semilab’s „Spectroscopic Ellipsometry” and „Spectroscopic Haze and Reflectance” techniques the complete characterization of the layer thickness and other optical parameters can be accomplished even on multilayer structures.
The haze is the percentage of light diffusely scattered and total transmitted light. The (Direct) Specular portion of transmitted light is absorbed in the light trap if the trap disk is in opened state. In this situation the collected spectrum distributes only the scattered portion of the transmitted light. When the trap disk is closed than the measured spectrum consists of the total transmitted light.
The SE series have a unique Modular Optical Platform including a spectroscopic ellipsometer with rotating compensator optics. The system has strong modular and versatile design, to answer needs from simple single layer thickness to more demanding applications such as those combining polarimetry, scatterometry and ellipsometry using Mueller matrix. It has a unique independent arm angle selection, and small spot size. The widest spectral range available on a single tool ranging from the Deep-UV (193 nm) up to Mid-IR (25 µm) with optional FTIR ellipsometer head uniquely offered on the same goniometer with the visible arms.
Printed Electronics. Optical & Electrical Metrology. Thin Film Coating characterization. Layer Thickness control.
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