Semilab introduces rotating compensator technique in its spectroscopic ellipsometer portfolio

03.12.2013

Semilab, a global supplier of metrology tools for the semiconductor and photovoltaic industries is also known for its ellipsometer systems. The product range includes a variety of instruments from small-scale, single wavelength R&D tools to fully automated spectroscopic ellipsometers for semiconductor process control.

Figure 1. Semilab’s Rotating Compensator Spectroscopic Ellipsometer setup with focusing objectives

Semilab introduces its new Rotating Compensator Ellipsometer (RCE), which brings significant improvements in accuracy, repeatability and throughput compared to previous systems, alongside with the userfriendly and versatile Spectroscopic Ellipsometry Analysis (SEA) software* with the following new functions:

  1. High sensitivity measurement and evaluation of various layers on substrates, even with small refractive index contrast (for example SiO2 on glass)
  2. Generalized anisotropy evaluation of organic and other anisotropic materials
  3. Mueller Matrix characterization (up to 16 coefficients)
  4. Jones Matrix determination
  5. Transmission ellipsometry measurement of transparent substrate samples with full characterization
  6. Real photometry measurement with Rp, Rs and Tp, Ts determination
  7. Scatterometry measurements with unique goniometer system: independent angle of incidence setting for the source and detection ellipsometer arms

With Semilab’s high intensity, 75 W Xe lamp light source and its focusing objectives, ARC layer thickness (and multilayer) measurement on textured solar Si wafers is also possible, including determination of depolarization spectra of the rough substrate surface.

 
Figure 2. Mueller Matrix elements of OLED material (anisotropic thin film)
 
Figure 3. Material anisotropy characterization: refractive index dispersion in sample plane, and out of sample plane for CBP organic layer
 
Semilab’s Rotating Compensator Spectroscopic Ellipsometer is available for our customers interested either in R&D or in automated characterization of thin film structures.
 
*SEA software is available for a limited demo evaluation period upon request.