Literature
Year
Title
Published
Topic
2024
Detection of structural asymmetries in Forksheet FET arrays using Mueller matrix ellipsometry: a theoretical study
Boglárka Dikó, Roberta Zsófia Kiss, Dávid Egri, Emeric Balogh
Defect detection, defect inspection, defects, ellipsometry, Materials science, spectroscopic ellipsometry
2024
Epitaxial silicon transition zone measurements by spreading resistance profiling and Fourier transform infrared reflectometry
E. E. Najbauer, L. Sinkó, Sz. Biró, Z. Durkó, P. Basa
carrier density, epitaxial layer, semiconductor, Silicon (Si), SRP-2100, SRP, FTIR REFLECTOMETRY
2024
Quantitative shear stress imaging in high throughput in-line Si wafer inspection
Zsolt Kovács, Csanád Ö. Boros, Teodóra N. Kovács, Zsolt Kovács, ZoltánT. Kiss
optical inspection, Silicon (Si), POLARIZED INFRARED IMAGING, VISUAL INSPECTION
2024
Radical electron-induced cellulose-semiconductors
Mikio Fukuhara, Tomonori Yokotsuka, Tetsuo Samoto, Masahiko Kumadaki, Mitsuhiro Takeda, Toshiyuki Hashida
Hall effect measurements, Materials science, Organic contamination, semiconductor, semiconductor materials, Semiconductor Devices, NANO HARDNESS, PDL Hall
2024
Millisecond-Scale Charge-Carrier Recombination Dynamics in the CsPbBr3 Perovskite
András Bojtor, Dávid Krisztián, Ferenc Korsós, Sándor Kollarics, Gábor Paráda, Thomas Pinel, Márton Kollár, Endre Horváth, Xavier Mettan, Hidetsugu Shiozawa, Bence G. Márkus, László Forró, Ferenc Simon
carrier density, carrier lifetime, Carrier mobility, Charge Carrier Lifetime, Charge carriers, photovoltaics, PV, recombination, Charge carrier density, PDL Hall
2024
Chitosan nanocoatings N-acylated with decanoic anhydride: Hydrophobic, hygroscopic and structural properties
Péter Márton, Adél Rácz, Beáta Szolnoki, János Madarász, Norbert Nagy, Bálint Fodor, Péter Basa, János Rohonczy, Zoltán Hórvölgyi
ellipsometry, XPS, ellipsometry porosimetry, THIN FILM THICKNESS MEASUREMENT, FTIR REFLECTOMETRY, Porosimetry, nanostructural coating, atomic layer deposition
2024
Optical Properties of TiO2 Grown by Atomic Layer Deposition Using Various Oxidizing Agents: The Ellipsometry Analysis of Absorption Properties
Jorge Luis Vazquez-Arce, Tibor Suta, Bálint Fodor, László Makai, Oscar Contreras, Amin Bahrami, Kornelius Nielsch, Hugo Tiznado
Ellipsometers, ellipsometry, optical inspection, oxidation, spectroscopic ellipsometry, Optical metrology, atomic layer deposition
2024
Femtosecond laser darkened copper surfaces: Characterization for possible application as laser beam blocker
Béla Hopp, Márton Sámi, Tamás Gera, Judit Budai, Gergő Ballai, Lázár Tóth, János Bohus, Gábor Gulyás, Tamás Szörényi, Tamás Smausz
nanoindentation, Surface, Surface measurement, surface treatment, NANO SURFACE CHARACTERIZATION
2023
Internal wettability investigation of mesoporous silica materials by ellipsometric porosimetry
Máté Füredi, Bálint Fodor, András Marton, Alberto Alvarez-Fernandez, Aysha ARiaz, Curran Kalha, Anna Regoutz, Stefan Guldin, Péter Basa
Ellipsometers, ellipsometry, ellipsometry porosimetry, ELLIPSOMETRIC POROSIMETRY, ELLIPSOMETRIC POROSIMETRY (R&D), Mesoporous silica films, Porosimetry, mesoporous
2023
Investigation of persistent photoconductance and related electron mobility in thin IGZO layers with the PDL Hall technique
András Bojtor, Gábor Paráda, Péter Tüttő, Hajnalka Korka, Kinga Szőke, Ferenc Korsós
Hall effect measurements, photoconductivity, IGZO ELECTRICAL CHARACTERIZATION, PDL Hall
2023
Simultaneous measurement of charge carrier concentration, mobility, and lifetime
Dávid Krisztián, Ferenc Korsós, Gergely Havasi
carrier lifetime, Carrier mobility, Charge carriers, concentration profile, lifetime measurements, photoconductive decay, silicon solar cells
2023
Integrated measurement of the actual and small perturbation lifetimes with improved accuracy
Dávid Krisztián; Ferenc Korsós; Enikő Kis; Gábor Paráda; Péter Tüttő
carrier lifetime, lifetime measurements, photoconductive decay, solar cells
2023
Noncontact Measurement of Doping with Enhanced Throughput and High Precision for Wide Bandgap Wafer Manufacturing
M. Wilson, C. Almeida, I. Shekerov, B. Schrayer, A. Savtchouk, B. Wilson and J. Lagowski
doping, Epitaxy, silicon carbide (SiC), COMPOUND MATERIAL CHARACTERIZATION, NON-CONTACT C-V PROFILING
2023
Evaluation of microhardness of short fiber-reinforced composites inside the root canal after different light curing methods – An in vitro study
Márk Fráter, János Grosz, András Jakab, Gábor Braunitzer, Tamás Tarjányi, Gábor Gulyás, Krisztián Bali, Paula Andrea Villa-Machado, Sufyan Garoushi, András Forster
Materials science, nanoindentation, COMPOUND MATERIAL CHARACTERIZATION
2023
Különböző Titán Implantátum Felületek Mechanikai Paramétereinek Nanoindentációs Meghatározása
Tarjányi Tamás, Dézsi Pál Patrik, Gulyás Gábor , Bali Krisztián, Körtvélyessy Győző
Materials science, mechanical properties, nanoindentation
2022
Exploiting Bi-modulated Magnetic Field and Drive Current Modulation to Achieve High-sensitivity Hall Measurements on Thermoelectric Samples
G. Paráda, F. Korsós, A. Bojtor, J-W. G. Bos, E. Don, J. W. Bowers, M. Togay
Hall effect measurements, mobility measurement, PDL Hall, AC magnetic field
2022
Photoluminescence imaging for slip line detection and characterization in silicon substrates
Romain DURU, Isabella MICA, Jacopo FRASCAROLI, Pierre BELLANGER
crystal defects, Defect detection, photoluminescence, Insulated Gate Bipolar Transistor (IGBT)
2022
Micro-Photoluminescence Imaging at Room Temperature of Crystallographic Defects Generated by Deep Trench Structures
Jacopo Frascaroli, Selene Colombo, Roberto Fumagalli, Isabella Mica, Luisito Livellara, Viktor Samu, and Gábor Molnár
crystal defects, photoluminescence, dislocations, buried defects, Deep Trenches, neural network
2022
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging
Jacopo Frascaroli; Marta Tonini; Selene Colombo; Luisito Livellara; Luca Mariani; Paolo Targa; Roberto Fumagalli; Viktor Samu; Máté Nagy, Gábor Molnár, Áron Horváth, Zoltán Bartal, Zoltán Kiss, Tamás Sipőcz, Isabella Mica
crystal defects, epitaxial layer, photoluminescence, Silicon (Si), neural network, image segmentation
2022
Micro-Photoluminescence Imaging at Room Temperature of Crystallographic Defects Generated by Deep Trench Structures
Jacopo Frascaroli, Selene Colombo, Roberto Fumagalli, Isabella Mica, Luisito Livellara, Viktor Samu, Gábor Molnár
crystal defects, photoluminescence, Photoluminescence Imaging, Micro-Photoluminescence Imaging
2022
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging
Jacopo Frascaroli; Marta Tonini; Selene Colombo; Luisito Livellara; Luca Mariani; Paolo Targa; Roberto Fumagalli; Viktor Samu; Máté Nagy; Gábor Molnár; Áron Horváth; Zoltán Bartal; Zoltán Kiss; Tamás Sipõcz; Isabella Mica
crystal defects, Defect detection, epitaxial layer, photoluminescence, Photoluminescence Imaging, semiconductor epitaxial layers, solid phase epitaxial growth, Micro-Photoluminescence Imaging, image segmentation
2022
Ultralong Charge Carrier Recombination Time in Methylammonium Lead Halide Perovskites
András Bojtor, Sándor Kollarics, Bence Gábor Márkus, Andrzej Sienkiewicz, Márton Kollár, László Forró, and Ferenc Simon
carrier density, photoconductivity, temperature, Temperature dependence, Phase Transformation of Si, Photonic integrated circuits
2022
Contactless sheet resistance characterization of silicon heterojunction solar cell structures using differential junction photovoltage technique
Ferenc Korsós, Gábor Paráda, Shaoyong Fu, Carmelo Connelli, Marcello Sciuto, and Serafino B. Lo Presti
Electric measurements, junction photovoltage technique, semiconductor junctions, semiconductor thin films, solar cells, thin films, NON-CONTACT SHEET RESISTANCE MEASUREMENT
2022
Modelling of Eddy-Current Measurement for Inhomogeneous Charge Carrier Depth Profile
D. Krisztián, F. Korsós, M. Kovács, F. Ujhelyi, P. Tüttö
depth profile, eddy current testing, photovoltaic cells, PV, silicon solar cells, solar cells, EU PVSEC, EU PVSEC, European Photovoltaic Solar Energy Conference and Exhibition, Silicon PV, Semilab to present paper at Silicon PV, Silicon
2022
Spectroscopic ellipsometry investigation of free liquid-liquid and liquid-air interfaces
László Makai, Benjamin Kalas, György Tiborcz
Ellipsometers, ellipsometry, Interfaces, spectroscopic ellipsometry, Surface, Surface measurement
2022
Analysis of malaria infection byproducts with Mueller matrix transmission ellipsometry
P. Basa, B. Fodor, Zs. Nagy, B. Oyunbolor, A. Hajtman, S. Bordács, I. Kézsmárki, A. Halbritter, Á. Orbán
ellipsometry, rotating compensator, mueller matrix, spectroscopic ellipsometer
2022
Lateral mapping of damage patterns in plasma immersion ion-implanted silicon
O. Kéri, Á. Kerekes, J. Szívós, A. Sütő, F. Korsós, G. Nádudvari & Z. Zolnai
annealing, Ion Implantation, laser beam annealing, Mapping, plasma ion implantation, Silicon (Si), Silicon
2022
Improved accuracy of eddy-current sensor based carrier lifetime measurement using laser excitation
Dávid Krisztián*, Ferenc Korsós, Ilias Saegh, Gábor Paráda, Martin Kovács, Zita Verdon, Csaba Jobbágy, Péter Tüttö, Xueqian Dong, Hao Deng, Shasha Wang and Xiaobo Chen
carrier lifetime, eddy current testing, photoconductive decay, E-PCD CARRIER LIFETIME FOR MONO-Si
2022
Characterization of AlXGa1−XN/GaN High Electron Mobility Transistor Structures with Mercury Probe Capacitance–Voltage and Current–Voltage
Eric Tucker, Frank Ramos, Samuel Frey, Robert J. Hillard, Péter Horváth, Gyula Zsákai, Attila Márton
dielectric characterization, dielectric charge, MERCURY C-V PROFILING, 2DEG sheet charge, pinch-off voltage, mercury gate
2021
Non-contact C-V and photoluminscence measurements for More-than-Moore SOI devices
J.P. Gambino; D. Price; R. Jerome; H. Ziad; T. Frank; A. Kerekes; V. Samu; A. Ross; Z. Kiss; J. Byrnes
Characterisation, CMOS integrated circuits, dielectric characterization, Non-contact, non-contact C-V, photoluminescence, Silicon (Si), SOI
2021
Bulk micro-defect detection with low-angle illumination
T. Szarvas, G. Molnár, Gy. Nádudvari, Sz. Tóth, O. Almásy, Sz. Spindler, D. Erdei, Sz. Pothorszky, R. Kretschmer, and S. Bauer
Bulk micro defects, Low-angle Light Scattering Tomography, low-angle illumination
2021
Application of light scattering tomography for Si(111) samples
T. Szarvas, Sz. Pothorszky, D. Erdei, G. Molnár, Gy. Nádudvari, O. Almásy, Sz. Spindler, R. Kretschmer, and S. Bauer
crystal defects, quality control, LIGHT SCATTERING TOMOGRAPHY, Semiconductor Devices, Optical metrology
2021
Ammonia-vapour-induced two-layer transformation of mesoporous silica coatings on various substrates
Lenke Kócs, Borbála Tegze, Emőke Albert, Csaba Major, András Szalai, Bálint Fodor, Péter Basa, György Sáfrán, Zoltán Hórvölgyi
porous silica coatings, spectroscopic ellipsometry, ELLIPSOMETRIC POROSIMETRY, mesoporous, anti-reflective coatings
2021
Assessment of Surface Preparation Methods for Mercury (Hg) Probe Schottky Capacitance-Voltage (MCV) on Epitaxial Silicon
Cristina Sanna, Patrick Taylor, Robert Hillard, Samuel Frey, Dan McDonald, Jonny Hoglund, Gyula Zsakai, Attila Marton and Peter Horvath
Epitaxial silicon, mercury probe, surface treatment, MERCURY C-V PROFILING, Capacitance-voltage characteristics, p-type, pre-treatment chamber
2021
Breakthrough instruments and products: Investigation of atomic layer deposited Al:ZnO layer by spectroscopic ellipsometry from the deep-UV to the mid-IR in one instrument
László Makai, Tero Lehto, Bálint Fodor, Peter King
doping, Electrical properties, spectroscopic ellipsometry, thin films, atomic layer deposition
2021
Carrier Lifetime Measurements of Monocrystalline Silicon Ingots Using Upgraded Laser E-PCD Technique
D. Krisztián, F. Korsós, I. Saegh, G. Paráda, P. Tüttő, X. Dong and H. Deng, S. Wang, X. Chen
carrier lifetime, Ingot, Monocrystalline, recombination, Silicon (Si), E-PCD CARRIER LIFETIME FOR MONO-Si
2020
Correlation study of bulk Si stress and lithography defects using Polarized Stress Imager
Janecska, Máté; Kovács, Zsolt; Pongracz, Anita;Tallian, Miklos
defect inspection, POLARIZED INFRARED IMAGING, FinFET, lithography
2020
Szilicium felületkezelése femtoszekundomos lézerrel (Surface treatment using femtosecond laser technology)
Windisch M., Buza G., Maloveczky A., Vida Á., Selmeczi D., Dankházi Z.:
Si surfaces, spectroscopic ellipsometry, surface treatment
2020
Micro-scale Imaging of Electrical Activity of Yield Killer Defects in 4H-SiC with Charge Assisted KFM and UV-Photoluminescence
M. Wilson, D. Greenock, D. Marinskiy, A. Savtchouk, A. Ross, C. Almeida, B. Schrayer, J. D’Amico and J. Lagowski
Defect detection, photoluminescence, silicon carbide (SiC)
2020
Durability of microporous hybrid silica coatings: Optical and wetting properties
Attila Ábrahám, Lenke Kócs, Emőke Albert, Borbála Tegze, Beáta Szolnoki, Norbert Nagy, György Sáfrán, Péter Basa, Zoltán Hórvölgyi
ELLIPSOMETRIC POROSIMETRY, Atomic Force Microscope (AFM), sol-gel coating, hybrid silica, antireflection, water-repellence
2020
Contactless Measurement of Sheet Resistance and Mobility of Inversion Charge Carriers on PV Wafers
Korsós, F., Dubois, S., Enjalbert, N., Kis-Szabó, K., László, G., Tóth, A., Tüttő, P.
Characterisation, corona - Kelvin, inversion layer sheet resistance, junction photovoltage technique, Non-contact, PV, sheet resistance
2020
Contactless measurement of sheet resistance and mobility of inversion charge carriers on photovoltaic wafers
Ferenc Korsós, Géza László, Péter Tüttő, Sebastien Dubois, Nicolas Enjalbert, Krisztián Kis-Szabó, Attila Tóth
Characterisation, inversion layer sheet resistance, junction photovoltage technique, Non-contact, PV, SHEET RESISTANCE MEASUREMENT
2020
Photo-Assisted Corona-Charge Characterization of Wide Bandgap Interfaces with Deep Traps Invisible in Standard C-V
Alexandre Savtchouk*, Marshall Wilson, John D’Amico, Carlos Almeida, Andrew Hoff, Jacek Lagowski
corona charge, CV, dielectric characterization, Interface, silicon carbide (SiC), COMPOUND MATERIAL CHARACTERIZATION, GaN
2020
Improved High Precision Dopant/Carrier Concentration Profiling with Corona-Charge Non-Contact C-V (CnCV)
Alexandre Savtchouk, Marshall Wilson, John D’Amico, Carlos Almeida, Jacek Lagowski
corona charge, non-contact C-V, profiling, silicon carbide (SiC), AlGaN, GaN
2020
Extended Applications of the Depth-Sensing Indentation Method
Dániel Olasz, János Lendvai, Attila Szállás, Gábor Gulyás, Nguyen Quang Chinh
nanoindentation, NANO SURFACE CHARACTERIZATION
2020
Tilt angle and dose rate monitoring of low energy ion implantation processes with photomodulated reflectance measurement
A. Pongrácz, J. Szívós, F. Ujhelyi, Zs. Zolnai, Ö. Sepsi, Á. Kun, Gy. Nádudvari, J. Byrnes, Leonard M. Rubin and Edward D. Moore
doping profile, implant dose, Ion Implantation, laser beam annealing, Photomodulated Reflection measurements, Reflectivity
2019
Integration of Reflectometry into a FOUP for Improved Cycle Time
Arpad Jakab, John Byrnes, Laszlo Makai, Audrey Engelsberg, Andrew Findlay, Alok Vaid, Nicholas Pieniazek, John Barker, Jeffrey Wood, Peter Rutka, Peter Basa, Jack Downey
ellipsometry, Metrology, reflectometry, semiconductor device measurement
2019
Near-infrared optical properties and proposed phase-change usefulness of transition metal disulfides
Akshay Singh, Yifei Li, Balint Fodor, Laszlo Makai, Jian Zhou, Haowei Xu, Austin Akey, Ju Li and R. Jaramillo
ellipsometry, visible spectra, Transmission electron microscopy, Density functional theory, Photonic integrated circuits, Transition metal chalcogenides, Optical metrology, Crystalline solids, Optical electronics
2019
Mid-low energy implantation tilt angle monitoring with photomodulated reflectance measurement
F. Ujhelyi, A. Pongracz, Á. Kun, J. Szívós, B. Bartal, B. Fodor, A. Bölcskei-Molnár, Gy. Nádudvari, J. Byrnes, L. M. Rubin
implant dose, in-line monitoring, Ion Implantation, Photomodulated Reflection measurements, semiconductor
2019
Monitoring subwavelength grating structures for vertical-cavity surface-emitting laser applications by spectroscopic ellipsometry
Emeric Balogh, Peter Basa, Attila Suto, Benjamin Powell, Anna Bölcskei-Molnár, and Szilvia Biró
ellipsometry, spectroscopic ellipsometry
2019
Accurate contact and contactless methods for emitter sheet resistance testing of PV wafers
Ferenc Korsós, Péter Tüttő, Ilias Saegh, Krisztián Kis-Szabó, and Attila Tóth
4pp, diffusion, junction photovoltage technique, photovoltaics, process monitoring
2019
Review of applications of Defect Photoluminescence Imaging (DPLI) during IC processing
L. Jastrzebski, R. Duru, D. Le-Cunff, M. Cannac S. Joblot, I. Mica, M.L.Polignano, A.Galbiati, P. Monge Roffarello,G. Nadudvari, Z. Kiss, I. Lajtos, A. Pongracz, G. Molnár, M. Nagy, L. Dudás, P. Basa, B.Greenwood, J.Gambino
crystal defects, defect inspection, Ion Implantation, Photoluminescence Imaging, process monitoring, Deep Trenches
2019
Implant Optimization for a 180nm BCD Technology
B. Greenwood, J. Kimball, S. Sridaran, K. Truong, A. Lee, S. Menon, J.P. Gambino, L. Jastrzebski, G. Nadudvari, L. Roszol, M. Nagy, G. Molnar, Z. Kiss, A. Pongracz, J. Byrnes
CMOS integrated circuits, defects, implant, Ion Implantation, photoluminescence, Micro-Photoluminescence Imaging
2019
Nanoszerkezetû, transzparens bevonatok elõállítása kolloidkémiai módszerekkel (Colloid chemical approach to the preparation of nanostructured, transparent coatings)
KÓCS Lenke, ZÁMBÓ Dániel, ALBERT Emõke, BASA Péter, SÁFRÁN György és HÓRVÖLGYI Zoltán
ELLIPSOMETRIC POROSIMETRY, THIN FILM CHARACTERIZATION, nanostructural coating, nanochemical method
2019
Accurate Dopant and Interface Characterization in Oxidized SiC with Refined Non-Contact CV Technique
Alexander Savtchouk, Marshall Wilson, Carlos Almeida, Dmitriy Marinskiy, Robert Hillard, Jacek Lagowski
CV, non-contact C-V, Non-Contact Measurement, silicon carbide (SiC)
2019
Photoinduced processes of adsorbed and associated dye molecules in mesoporous titania coatings
Borbála Tegze, Emőke Albert, Bálint Fodor, György Sáfrán, Zoltán Hórvölgyi
ELLIPSOMETRIC POROSIMETRY, sol-gel coating, mesoporous, photodegradation, dye association, dye adsorption, titania
2018
Micro-Photoluminescence Imaging of Dislocation Generation in 0.18 μm Power Semiconductor Devices with Deep Trenches
L. Jastrzebski, G. Nadudvari, D. T. Cseh, L. Roszol, G. Molnar, I. Lajtos
Micro-Photoluminescence Imaging, Dislocation Generation, Semiconductor Devices, Deep Trenches, Wafer Fabrication
2018
Efficiency limiting crystal defects in monocrystalline silicon and their characterization in production
F. Korsós, L. Roszol, F. Jay, T. Szarvas, Z. Kiss, A. Szabó, I. Soczó, Gy. Nádudvari, N. Laurent
Czochralski, Bulk micro defects, Thermal history, PERT solar cells, carrier lifetime
2018
Point and extended defect interaction in low – high energy phosphorus implantation sequences
I. Mica, M. L. Polignano, P. Bacciaglia, D. Brazzelli, D. Cseh, A. Galbiati, S. Grasso, M. Juhel, Z. T. Kiss, P. Monge Roffarello, E. Tomezzoli, A. M. Torti
Silicon, P implantation sequences, Implantation defects, annealing
2018
Analysis of near-surface metal contamination by photoluminescence measurements
M.L. Polignano, A. Galbiati, I. Mica, D. Magni, D. Cseh, F. Jay, P. Basa, N. Laurent, I. Lajtos, G. Molnár, L. Dudás, L. Roszol, L. Jastrzebski
Carrier diffusion length, metal contamination, photoluminescence
2018
Simple and versatile UV-ozone oxide for silicon solar cell applications
Sara Bakhshi, Ngwe Zin, Haider Ali, Marshall Wilson, Debashis Chanda, Kristopher O Davis, Winston V Schoenfeld
cleaning technology, passivated surface, photovoltaics, UV-Ozone oxide
2018
Mitigating light and elevated temperature induced degradation in multicrystalline silicon wafers and PERC solar cells using phosphorus diffusion gettering
Sagnik Chakraborty, Ying Huang, Marshall Wilson, Armin G Aberle, Joel B Li
phosphorus, silicon solar cells
2018
Diversified Applications of UV-Ozone Oxide: Effective Surface Clean and High-Quality Passivation
Sara Bakhshi, Ngwe Zin, Marshall Wilson, Ismail Kashkoush, Kristopher O Davis, Winston V Schoenfeld
cleaning technology, passivation, semiconductor, silicon solar cells, UV-Ozone oxide
2018
Thermally Stable Molybdenum Oxide Hole-Selective Contacts Deposited using Spatial Atomic Layer Deposition
Geoffrey Gregory, Marshall Wilson, Haider Ali, Kristopher O Davis
annealing, semiconductor, silicon compounds, solar cells, thin films, thermal stability, molybdenum compounds, atomic layer deposition
2018
Ultra-High Sensitivity Surface Photovoltage Measurement of Heavy Metal Contamination in Silicon Wafers with Fast Metal Identification
Marshall Wilson, Alexandre Savtchouk, John D'Amico, Bret Schrayer, Dmitriy Marinskiy, Piotr Edelman, Carlos Almeida, Troy Zajac, Andrew David Findlay, Jacek Lagowski
contamination, Diffusion Length, heavy metal contamination, Minority Carrier Diffusion Length, Silicon (Si), surface photovoltage, wafer mapping
2017
Surface Strained Ge-Cz Wafers by Sn-Implantation For High Electron and Hole Mobility
J. Borland, M. Sugitani, S.S. Chaung, Y.J. Lee, K. Huet, A. Joshi, A. Wan, L. Wong, P. Horvath, A. Finley
Surface Strained Ge-Cz Wafers By Sn-Implantation For High Electron And Hole Mobility
2017
Refractive Indexes and Extinction Coefficients of n- and p-type Doped GaInP, AlInP and AlGaInP for Multijunction Solar Cells
E. Ochoa-Martínez, L. Barrutia, M. Ochoa, E. Barrigón, I. García, I. Rey-Stolle, C. Algora, P. Basa, G. Kronome, M. Gabás
refractive index, n-type, p-type, doped GaInP, AlInP, AlGaInP, multijunction solar cells
2017
Silica Sol-gel Coatings with Improved Light Transmittance and Stability
L. Kócs, E. Albert, B. Tegze, M. Kabai-Faix,Cs. Major, A. Szalai, P. Basa, Z. Hórvölgyi
ELLIPSOMETRIC POROSIMETRY, sol-gel coating, improved light transmittance, long-term optical stability, network strengthening, porosity
2017
Photoluminescence for In-Line Buried Defects Detection in Silicon Devices
R. Duru, D. Le-Cunff, M. Cannac, N. Laurent, L. Dudas, Z.T. Kiss, D. Cseh, I. Lajtos, F. Jay, Gy. Nadudvari
photoluminescence, dislocations, buried defects, non-visual defects
2017
Effect of phosphorus and boron diffusion gettering on the light induced degradation in multicrystalline silicon wafers
Sagnik Chakraborty, Marshall Wilson, Maria Luz Manalo, Abhay Sarda, Johnson Wong, Romika Sharma, Armin G Aberle, Joel B Li
boron, diffusion, phosphorus, Silicon, multicrystalline silicon, diffusion gettering
2017
Kelvin Force Probe Microscopy of Ferroelectric Si: HfO2
Dmitriy Marinskiy, Patrick Polakowski, Jacek Lagowski, Marshall Wilson, Piotr Edelman, Johannes Müller
corona - Kelvin, Non-Contact Measurement, THIN FILM CHARACTERIZATION
2017
Influence of surface preparation and cleaning on the passivation of boron diffused silicon surfaces for high efficiency photovoltaics
Haider Ali, Anamaria Moldovan, Sebastian Mack, Marshall Wilson, Winston V Schoenfeld, Kristopher O Davis
aluminum oxide, cleaning technology, passivated surface, photovoltaics, Silicon (Si), Silicon Nitride
2017
Recent Advancement in Charge and Photo-Assisted Non-Contact Electrical Characterization of SiC, GaN, and AlGaN/GaN HEMT
Marshall Wilson, Andrew Findlay, Alexandre Savtchouk, John D'Amico, Robert Hillard, Fumimasa Horikiri, Jacek Lagowski
corona - Kelvin, dielectric characterization, Doping measurements, full wafer mapping, Non-Contact Measurement, silicon carbide (SiC)
2017
Ferroelectric HfO2 thin film testing and whole wafer mapping with non‐contact corona‐Kelvin metrology
Dmitriy Marinskiy, Patrick Polakowski, Piotr Edelman, Marshall Wilson, Jacek Lagowski, Joachim Metzger, Robert Binder, Johannes Müller
corona - Kelvin, noncontact metrology, surface voltage, THIN FILM CHARACTERIZATION, ferroelectric, HfO2
2017
Improving Silicon Surface Passivation with a Silicon Oxide Layer Grown via Ozonated Deionized Water
Sara Bakhshi, Ngwe Zin, Kristopher O Davis, Marshall Wilson, Ismail Kashkoush, Winston V Schoenfeld
aluminium compounds, aluminum oxide, carrier lifetime, passivation, photovoltaic cells, Silicon (Si), Silicon Nitride, surface passivation
2017
Piezoelectric modulation of surface voltage in GaN and AlGaN/GaN: charge screening effects and 2DEG
Marshall Wilson, Bret Schrayer, Alexandre Savtchouk, Bob Hillard, Jacek Lagowski
non-contact C-V, surface voltage, piezoelectric polarization, AlGaN, GaN
2017
Non-contact photo-assisted charge-based characterization of dielectric interfaces in SiC: Evidence of slow states
Alexander Savtchouk, Marshall Wilson, Jacek Lagowski
Corona-Kelvin Metrology, minority carrier lifetime, non-contact C-V, photoconductive decay, silicon carbide (SiC), ELECTRICAL CHARACTERIZATION OF DIELECTRICS AND INTERFACES
2016
Optical characterization of the coloration process in electrochromicamorphous and crystalline WO3films by spectroscopic ellipsometry
G. Yuan, Ch. Hua, L. Huang, Ch. Defranoux, P. Basa, Y. Liu, Ch. Song, G. Han
spectroscopic ellipsometry, WO3, Electrochromic film, Coloration process
2016
Surface modification and porosimetry of vertically aligned hexagonal mesoporous silica films
C. Robertson, A. W. Lodge, P. Basa, M. Carravetta, A. L. Hector, R. J. Kashtiban, J. Sloan, D. C. Smith, J. Spencer, A. Walcarius
ELLIPSOMETRIC POROSIMETRY, Mesoporous silica films, Vertically aligned hexagonal pores, Electrochemically assisted surfactant assembly (EASA), Porosimetry
2016
Non-Visual Defect Monitoring with Surface Photovoltage Mapping
Andrew David Findlay, Dmitriy Marinskiy, Piotr Edelman, Marshall Wilson, Alexandre Savtchouk, Carlos Almeida, Jacek Lagowski
Non-Contact Measurement, silicon carbide (SiC), surface voltage, wafer mapping, non-visual defects
2016
Non-contact electrical characterization of GaN, SiC and AlGaN/GaN for device applications
A Findlay, J Lagowski, M Wilson, A Savtchouk, B Hillard
doping, mercury probe, non-contact electrical metrology, Non-Contact Measurement, silicon carbide (SiC), silicon compounds, Surface charge, AlGaN, GaN
2016
Accurate Doping Density Determination in SiC with Constant Surface Potential Corona Charging; Industry Ready Alternative to Hg-CV
Alexander Savtchouk, Marshall Wilson, Jacek Lagowski, Andor Czett, Csaba Buday
corona charge, Non-contact, silicon carbide (SiC), surface dopant density
2016
Inkjet-Printed Vertically Emitting Solid-State Organic Lasers
O. Mhibik, S. Ch´enais, S. Forget, Ch. Defranoux, S. Sanaur
vertically-emitting solid-state organic lasers (VECSOLs); inkjet printing; new host polymer matrix for standard laser dyes; Tunable laser
2016
Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers
Z. Szabó, Zs. Baji, P. Basa, Zs. Czigány, I. Bársony, H-Y. Wang, J. Volk
GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED
2015
Surface Voltage and μPCD Mapping of Defect in Epitaxial SiC
M. Wilson, A. Savtchouk, A. Findlay, J. Lagowski, P. Edelman, D. Marinskiy, J. D’Amico, F. Korsós, N. Orsós, M. Cs. Varga
Defect Mapping, lifetime, silicon carbide (SiC), Triangular Defect
2015
lmproved Non-Contact Capacitance-Voltage Technique for Resistivity Profiling of Epitaxial Silicon
P. Horvath, R. Ring, P. Tutto
2015
Carrier Scattering and Relaxation Dynamics in n-Type In0.83Ga0.17As as a Function of Temperature and Doping Density
Y. Ma, Y. Gu, Y. Zhang, X. Chen, S. Xi, Z. Boldizsár, L. Huang, L. Zhou
Carrier scattering, relaxation dynamics, In0.83Ga0.17As
2015
Antibacterial Properties of Ag–TiO2 Composite Sol–Gel Coatings
E. Albert, P.A. Albouy, A. Ayral, P. Basa, G. Csík, N. Nagy, S. Roualdès, V. Rouessac, G. Sáfrán, Á. Suhajda, Z. Zolnai, Z. Hórvölgyi
of long-term antibacterial activity, silver doped titania coatings, titania layer structure, ELLIPSOMETRIC POROSIMETRY, sol-gel coating
2015
Ellipsometry Study of Process Deposition of Amorphous Indium Gallium Zinc Oxide Sputtered Thin Films
C. Talagrand, X. Boddaert, D.G. Selmeczi, C. Defranoux, P. Collot
InGaZnO, spectroscopic ellipsometry, Dielectric function, Process deposition, Amorphous semiconductor
2015
Introducing Nanoscaled Surface Morphology and Percolation Barrier Network into Mesoporous Silica Coatings
E. Albert, P. Basa, A. Deák, A. Németh, Z. Osváth, G. Sáfrán, Z. Zolnai, Z. Hórvölgyi, N. Nagy
artificial surface morphologies, hexagonally ordered silica spheres, ion irradiation, multilayer, nanopatterning process, porous silica coatings, sub-micron scale, ELLIPSOMETRIC POROSIMETRY
2015
Non-Visual Defect Monitoring with Surface Voltage Mapping
Andrew Findlay, Dmitriy Marinskiy, Piotr Edelman, Marshall Wilson, Alexandre Savtchouk, Jacek Lagowski
Non-Contact Measurement, silicon carbide (SiC), surface voltage, wafer mapping, non-visual defects
2015
Drift characteristics of mobile ions in SiNx films and solar cells
Marshall Wilson, Alexandre Savtchouk, Piotr Edelman, Dmitriy Marinskiy, Jacek Lagowski
Characterisation, full wafer mapping, Kelvin probe, Silicon Nitride, solar cells
2015
State-of-the-art multiparameter characterization of the chemical and field effect passivation of very high lifetime n-Si with n+ front surface field (FSF)
Marshall Wilson, Andrew Findlay, John D'Amico, Alexandre Savtchouk, Jacek Lagowski
carrier lifetime, corona charge, Corona – Kelvin method, Non-Contact Measurement, passivation, silicon compounds, solar cells, surface recombination
2014
Dielectric properties of SURMOF HKUST-1 films
M. Krishtab, G. Pourtois, K. Vanstreels, H. Gliemann, M. Tsotsalas, C. Wöll, R. Hillard, M. Tallian, S. De Gendt, M. Baklanov
2014
Detection and Characterization of Three-Dimensional Interconnect Bonding Voids by Infrared Microscopy
J. Höglund, Z. Kiss, G. Nádudvari, Zs. Kovács, Sz. Velkei, C. Moore, V. Vartanian, R.A. Allen
infrared, microscopy, optical inspection, optical systems
2014
Non-Contact High Precision Alternative to Hg-Probe for Dopant Profiling in SiC
A. Czett, Cs. Buday, S. Savtchouk, D. Marinskiy
silicon carbide (SiC), corona-Kelvin measurement, mercury probe, doping profile
2014
Air Gap CV Measurement for Doping Concentration in Epitaxial Silicon
F. Heider, J. Baumgartl, P. Horváth, T. Jaehrling
air gaps, capacitance measurement, doping profile, Electrical resistivity, epitaxial layer, Silicon (Si), voltage measurement
2014
Transient Method for Lifetime Characterization of Monocrystalline Si Ingots
G. Paráda, F. Korsós, P. Tüttő
carrier lifetime, Monocrystalline, Ingot
2014
Lifetime Characterization of mc:Si Bricks by Upgraded μ-PCD Technique
F. Korsós, A. Jász
Microwave Photoconductive Decay (μ-PCD), photoconductive decay, surface recombination
2014
Inline PL Inspection and Advanced Offline Evaluation of Passivation Defects, Charge and Interfaces
A. Findlay, J. Lagowski, M. Wilson, J. D'Amico, A. Savtchouk, F. Korsós, G. Nádudvari
corona charge, Microwave, Passivation Defects, photoconductive decay, Photoluminescence Imaging, Quasisteady State
2014
Application of Non-Contact Corona-Kelvin Metrology for Characterization of PV Dielectrics on Textured Surfaces
M. Wilson, Z. Hameiri, N. Nandakumar, S. Duttagupta
alumincorona, dielectric materials, passivation, silicon compounds, solar cells, surface texture
2014
Experimental Study on the Role of Parameters Affecting Surface Recombination and Emitter Passivation
M. Wilson, A. Findlay, J. D'Amico, A. Savtchouk, J. Lagowski, Z. Xu, R. Yang, T. Guo
aluminium compounds, elemental semiconductors, interface states, passivation, Silicon (Si), silicon compounds, solar cells, space charge, surface recombination
2014
Interface Traps at Intrinsic ia-Si:H/c-Si Interfaces
A. Savtchouk, M. Wilson, P. Edelman, J. Lagowski, Z. Xu, R. Yang, T. Guo, C. Zhou, H. Diao, Y. Xiang, L. Zhao, W. Zhang
Interface Trap
2014
Pioneering Application of Corona Charge-Kelvin Probe Metrology to Noncontact Characterization of In0.53 Ga0.47 As/Al2O3/HfO2 Stack
J. D’Amico, A. Savtchouk, M. Wilson, J. Lagowski, W. Wang, T. Kim, G. Bersuker, D. Veksler, D. Koh
corona charge, dielectric characterization, non-contact C-V, non-contact I-V
2014
New Approach to Surface Voltage Based Non-Visual Defect Inspection
D. Marinskiy, J. Lagowski, M. Wilson, A. Findlay, C. Almeida, P. Edelman
surface voltage, defect inspection, Kelvin probe
2014
Measuring CET of High-k Dielectrics with Novel Kinetic Approach Using Micro-Site Corona – Kelvin Method
D. Marinskiy, T.C. Loy, H.C. Yeh, M. Wilson, J. Lagowski
Corona-Kelvin Metrology, high-k dielectrics, capacitance equivalent thickness, corona discharge
2014
A Novel Approach to Measuring Doping in SiC by Micro Spot Corona-Kelvin Method
D. Marinskiy, A. Savtchouk
corona - Kelvin, silicon carbide (SiC), doping
2014
MBIR Characterization of Photosensitive Polyimide in High Volume Manufacturing
T.E. Kagalwala, B.M. Erwin, V.L. Calero-DdelC, Y.M. Brovman, J. Hoglund
chip scale packaging, flip-chip devices, passivation, process monitoring, reflectometry
2014
Benefit of Combining Metrology Techniques for Thin SiGe:B Layers
D. Le Cunff, T. Nguyen, R. Duru, F. Abbate, J. Hoglund, N. Laurent, F. Pernot, M. Wormington
Ge-Si alloys, boron, elemental semiconductors, semiconductor doping, semiconductor epitaxial layers
2014
On Determining the Optical Properties and Layer Structure from Spectroscopic Ellipsometric Data using Automated Artifact Minimization Method
J. Budai, B. Farkas, Z.L. Horváth, Zs. Geretovszky
ellipsometry, modelling, Artifact minimization, Numerical inversion
2014
Study of Annealing Effects Upon the Optical and Electrical Properties of SnO2:F/SiCxOy Low Emissivity Coatings by Spectroscopic Ellipsometry
K. Wang, B. Cheng, B. Wu, C. Defranoux, P. Basa, C. Song, G. Han, Y. Liu
spectroscopic ellipsometry, Fluorinated tin oxide, Low emissivity, annealing
2014
Extremely low surface recombination velocities on low‐resistivity n‐type and p‐type crystalline silicon using dynamically deposited remote plasma silicon nitride films
Shubham Duttagupta, Fen Lin, Marshall Wilson, Matthew B Boreland, Bram Hoex, Armin G Aberle
corona-voltage metrology, Non-Contact Measurement, photovoltaics, silicon defect density, Silicon Nitride, surface passivation, surface recombination velocity
2013
Spectroscopic Ellipsometry on Metal and Metal-Oxide Multilayer Hybrid Plasmonic Nanostructures
A.A. Khosroabadi, P. Gangopadhyay, B. Cocilovo, L. Makai, P. Basa, B. Duong, J. Thomas, and R.A. Norwood
spectroscopic ellipsometry
2013
Charging Behavior of Silicon Nitride Based Non-Volatile Memory Structures with Embedded Semiconductor Nanocrystals
Zs.J. Horváth, P. Basa, T. Jászi, K.Z. Molnár, A.E. Pap, Gy. Molnár
2013
Comparison of Laser Textured Silicon Surfaces Prepared by Different Laser Sources
Z. Tóth, A. Gárdián, M. Füle, J. Csontos, F. Korsós, P. Basa
Laser Processing, Silicon (Si), Texturisation
2013
Novel Approach to In-Line PL Imaging for Passivation Inspection of Silicon PV
F. Korsós, Z. Kiss, G. Nádudvari, A. Zsovár, M. Wilson, P. Edelman, J. Lagowski, J. Chen, L. Zhao, C. Zhou, W. Wang, B. Wang
surface passivation, PL imaging, QSS-μPCD
2013
Single Image Concept for Photoluminescence Based Emitter Saturation Current Imaging Using Direct Calibration by the QSS-μPCD Method
F. Korsós, A. Zsóvár, J. Lagowski, M. Wilson, Z. Kiss, Z. Kovács, G. Nádudvari
elemental semiconductors, photoluminescence, Silicon (Si)
2013
Lifetime Measurements on Attached Epilayers and Detached Epifoils Grown on Reorganised Porous Silicon Showing a Bulk Lifetime Exceeding 100 μs
H.S. Radhakrishnan, M. Debucquoy, F. Korsós, K. Van Nieuwenhuysen, V. Depauw, I. Gordon, R. Mertens, J. Poortmans
epilayer, bulk lifetime, porous silicon, surface recombination velocity, Microwave Photoconductive Decay (μ-PCD), QSSPC, PL, PC1D
2013
Unified Lifetime Metrology and Photoluminescence Imaging for Silicon PV
M. Wilson, J. Lagowski, P. Edelman, F. Korsós, G. Nádudvari, Z. Kiss, J. Schmauder, V. Mihailetchi, S. Olibet
photoluminescence, emitter saturation current, lifetime
2013
Development of a-Si:H/c-Si Heterojunctions for the i2-Module Concept: Low-Temperature Passivation and Emitter Formation on Wafers Bonded to Glass
J. Govaerts, S.N. Granata, T. Bearda, F. Dross, C. Boulord, G. Beaucarne, F. Korsós, K. Baert, I. Gordon, J. Poortmans
PECVD, Heterojunction, Silicone bonding, Module-level processing
2013
Importance of Defect Photoionization in Silicon-Rich SiNx Dielectrics for High PID Resistance
M. Wilson, A. Savthouck, J. D'Amico, J. Lagowski, S. Schmitt, A. Schneider, S. Olibet
deep levels, defect states, Dielectric thin films, infrared spectra, leakage currents, photoconductivity, photoionisation, refractive index, silicon compounds, stoichiometry, visible spectra
2013
Advanced Interface Trap Metrology for Silicon PV
J. D'Amico, M. Wilson, C. Almeida, J. Lagowski, S. Olibet
Characterisation, Interface, passivation, recombination, Silicon Nitride
2013
Application of Corona-Kelvin Metrology for Optimizing Surface Passivation: Dit, Surface Recombination and PID
A. Savtchouk, M. Wilson, J. Lagowski, J. D’Amico, A. Findlay, P. Edelman
Corona-Kelvin Metrology, surface passivation, surface recombination
2013
Technique for Monitoring of PID Susceptibility and Interface Trap Density in Advanced Passivation Dielectrics
M. Wilson, A. Findlay, J. Lagowski, J. D’Amico, A. Savtchouk
passivation dielectric, interface trap density, PID susceptibility
2013
Noncontact Imaging of PID Susceptibility of Passivation Films and Monitoring of Relevant Dielectric Properties
A. Findlay, M. Wilson, J. Lagowski, J. D’Amico, S. Savtchouk
PID susceptibility, Passivation Film, Relevant Dielectric Properties
2013
Influence of Precursor Gas Ratio and Firing on Silicon Surface Passivation by APCVD Aluminium Oxide
K.O. Davis, K. Jiang, M. Wilson, C. Demberger, H. Zunft, H. Haverkamp, D. Habermann, W.V. Schoenfeld
atmospheric pressure CVD, Silicon (Si), passivation, aluminum oxide
2013
Kelvin Force Microscopy Characterization of Corona Charged Dielectric Surfaces
D. Marinskiy, P. Edelman, A.D. Snider
Kelvin force microscopy, corona charge, concentration profile, surface diffusion
2013
Characterization of Residual Implant Damage by Generation Time Technique
Y.J. Jee, C.Y. Kim, C.S. Jun, T.S. Kim, A. Belyaev, D. Marinskiy
Residual implant damage, Generation lifetime, Breakdown voltage, Doping measurements, surface photovoltage, Corona – Kelvin method
2012
Charging Behaviour of MNOS Structures with Embedded Ge Nanocrystals
Zs. J. Horváth, K. Zs. Molnár, Gy. Molnár, P. Basa, T. Jászi, A. E. Pap, R. Lovassy, P. Turmezei
MNOS structures, Ge nanocrytals, Oxide thickness
2012
High Resolution Mapping of Carrier Lifetime on Bulk PV Si Material by Dual Wavelength MW-PCD Method
F. Korsós, B. Radics, E. Pihan, N. Plassat, B. Drevet, N. Laurent, A. Jouini
2012
Recombination via Point Defects and their Complexes in Solar Silicon
A.R. Peaker, V.P. Markevich, B. Hamilton, G. Parada, A. Dudás, A. Pap, E. Don, B. Lim, J. Schmidt, L. Yu, Y. Yoon, G. Rozgonyi
Laplace deep level transient spectroscopy, minority carrier lifetime, passivation, recombination, silicon solar cells, transition metals
2012
Integrated Electrical and Optical Characterization of Large Area Thin Film Photovoltaic Materials
G. Szitási, F. Korsós, D. Selmeczi, O. Takács, F. Novinics, P. Tüttő, A. Findlay, M. Wilson
eddy current testing, ellipsometry, fluorine, photoconducting materials, photovoltaic effects, spectroscopy, tin compounds
2012
Photoluminescence Imaging of as-Cut Wafers Combined with Lifetime Calibration by MW-PCD Technique
F. Korsós, J. Csontos, Z. Kiss, G. Nádudvari, P. Tüttő, Z. Tóth, M. Wilson
Wafer-Based Silicon Solar Cells, Microwave Photoconductive Decay (μ-PCD), Photoluminescence Imaging
2012
Unification of Excess Carrier Lifetime Measurement for Silicon PV
M. Wilson, A. Savtchouk, F. Korsós, G. Paráda, K. Kis-Szabo, V.D. Mihailetchi, S. Olibet
lifetime, passivation, field-effect
2012
Unified Lifetime Measurement for Silicon PV
M. Wilson, J. Lagowski, P. Edelman, A. Savtchouk, A. Findlay, S. Olibet, V. Mihailetchi
elemental semiconductors, reliability, Silicon (Si), solar cells
2012
Improved QSS-μPCD Measurement with Quality of Decay Control: Correlation with Steady-State Carrier Lifetime
M. Wilson, P. Edelman, J. Lagowski, S. Olibet, V. Mihailetchi
Microwave Photoconductive Decay (μ-PCD), Steady-state lifetime, emitter saturation current
2012
State-of-the-art Surface Passivation of Boron Emitters using Inline PECVD AlOx/SiNx Stacks for Industrial High-Efficiency Silicon Wafer Solar Cells
S. Duttagupta, Fen Lin, K.D. Shetty, M. Wilson, Fa-Jun Ma, Jiaji Lin, A.G. Aberle, B. Hoex
aluminium compounds, current density, elemental semiconductors, passivation, plasma CVD, short-circuit currents, Silicon (Si), silicon compounds, solar cells
2011
Multifunction Metrology Platform for Photovoltaics
M. Wilson, J. D'Amico, A. Savtchouk, P. Edelman, A. Findlay, L. Jastrzebski, J. Lagowski, K. Kis-Szabó, F. Korsós, A. Tóth, A. Pap, R. Kopecek, K. Peter
electron traps, passivation, photovoltaic cells, semiconductor thin films, Silicon (Si)
2011
New µ-PCD Based Method for Sorting Boron and Gallium Doped Feedstock Material
F. Korsós, G. Paráda, D. Fátay
Wafer-Based Silicon Solar Cells, Silicon Feedstock, Crystallisation, Wafering, Microwave Photoconductive Decay (μ-PCD), carrier lifetime
2011
Emitter Passivation by Charge Injection
M. Wilson, J. Lagowski, A. Savtchouk, A. Findlay, L. Jastrzebski, S. Olibet, V.D. Mihailetchi
charge injection, corona, electron-hole recombination, interface states, passivation, solar cells, thin films, tunneling
2011
QSS-μPCD Measurement of Lifetime in Silicon Wafers: Advantages and new Applications
M. Wilson, A. Savtchouk, J. Lagowskia, K. Kis-Szabó, F. Korsós, A. Tóth, R. Kopecek, V.D. Mihailetchi
Microwave Photoconductive Decay (μ-PCD), J0, photovoltaics, lifetime
2011
Novel Noncontact Approach to Monitoring the Field-Effect Passivation of Emitters
M.Wilson, A. Savtchouk, J. Lagowski, F. Korsós, A. Tóth, R. Kopecek, V.D. Mihailetchic, R. Petres, T. Boescke
emitter passivation, field-effect, J0, corona charge
2011
Monitoring of Incoming Silicon PV Wafers with Modified Surface Photovoltage (SPV) Minority Carrier Diffusion Length Method
M. Wilson, A. Savtchouk, F. Buchholz, S. Olibet, R. Kopecek, K. Peter
Minority Carrier Diffusion Length, surface photovoltage, Incoming Wafers
2011
Lifetime Degradation in Dark Observed in Mono Crystalline Cz-Silicon
J. Arumughan, J. Theobald, M. Wilson, L. Hildebrand, R. Petres, A. Savtchouk, R. Kopecek
c-Si, Degradation, Diffusion Length, lifetime
2011
Light Induced Degradation in Multicrystalline Solar Grade Silicon Solar Cells Evaluated Using Accelerated LID
K. Peter, P. Preis, P.E. Díaz-Pérez, J. Theobald, E. Enebakk, A.-K. Soiland, A. Savtchouk, M. Wilson
Solar Grade Silicon, Light Induced Degradation (LID)
2010
Implant Monitoring Measurements On Ultra Shallow Implants Before And After Anneal Using Photomodulated Reflection And Junction Photovoltage Measurement Techniques
M. Tallián, A. Pap, K. Mocsár, A. Somogyi, Gy. Nádudvari, D. Kosztka, T. Pavelka
ultra-shallow junction (USJ), Photomodulated Reflection measurements
2010
Monitoring Ion Implantation Energy Using Non‐contact Characterization Methods
M. Tallián, A. Pap, K. Mocsár, A. Somogyi, G. Nádudvari, D. Kosztka, T. Pavelka
ultra-shallow junction (USJ), extremely low ion implant energies, Photomodulated Reflection measurements
2010
Novel Noncontact Approach to Characterization of Mobility in Inversion Layers Using Corona Charging of Dielectric and SPV Monitoring of Sheet Resistance
J-L. Everaert, E. Rosseel, A. Mészáros, K. Kis-Szabó, P. Tüttő, A. Pap, T. Pavelka, M. Wilson, A. Findlay, P. Edelman, J. Lagowski
noncontact method, mobility measurement, corona-voltage metrology, ac-surface photovoltage measurement, inversion layer sheet resistance
2010
Contactless Mobility Measurements of Inversion Charge Carriers on Silicon Substrates with SiO2 and HfO2 Gate Dielectrics
J-L. Everaert, E. Rosseel, J. Dekoster, A. Pap, A. Mészáros, K. Kis-Szabó, T. Pavelka
Dielectrics, Carrier mobility, Charge carriers, Dielectric thin films, Metrology
2010
Impact of Laser Anneal Thermal Budget on the Quality of Thin SiGe Channels with a High Ge Content
E. Rosseel, A. Hikavyy, J-L. Everaert, L. Witters, J. Mitard, T. Hoffmann, W. Vandervorst, A. Pap, T. Pavelka
Ge-Si alloys, X-ray diffraction, elemental semiconductors, laser beam annealing, semiconductor epitaxial layers, semiconductor junctions, Silicon (Si)
2010
Accelerated Light-Induced Degradation (ALID) for Monitoring of Defects in PV Silicon Wafers and Solar Cells
M. Wilson, P. Edelman, A. Savtchouk, J. D’Amico, A. Findlay, J. Lagowski
Silicon (Si), photovoltage, contamination, PV, defects, boron–oxygen dimer, full wafer mapping, light degradation, solar cells
2010
Multicrystalline Solar Grade Silicon Solar Cells
K. Peter, R. Kopecek, M. Wilson, J. Lagowski, E. Enebakk, A. Soiland, S. Grandum
Crystallisation, elemental semiconductors, solar cells
2009
Nanoindentation of Silicon
P. M. Nagy, P. Horvath, G. Peto, E. Kalman
Atomic Force Microscope (AFM), Ion Implantation, nanoindentation, Phase Transformation of Si, Pile-Up, Pop-In, Surface Modification
2009
In‐line 90 nm Technology Gate Oxide Nitrogen Monitoring With Non‐Contact Electrical Technique
N. Pic, G. Polisski, E. Paire, V. Rizzo, C. Grosjean, B. Bortolotti, J. D'Amico, N. Cabuil
oxynitrides, interface trapped charge, in-line monitoring, XPS, D-SIMS, RTP, Charge coupled devices, Ellipsometers, Nitridation, Surface charge, Surface oxidation
2009
Application Of The SPV-based Surface Lifetime Technique To In-Line Monitoring Of Surface Cu Contamination
J. D’Amico, A. Savtchouk, M. Wilson, C.H. Kim, H.W. Yoo, C.H. Lee, T.K. Kim, S.H. Son
Copper (Cu), Surface Lifetime, surface photovoltage, Surface Contamination, Metrology, in-line monitoring, elemental semiconductors, Inductively coupled plasma, Integrated circuits
2009
Comparison of Silicon Surface Preparation Methods for Measurement of Minority Carrier Lifetime Using the Microwave Photoconductive Decay (µ-PCD) Coupled with Continuous Corona Charge (Charge-PCD)
T. Pavelka, Á. Pap, P. Kenesei, M. Varga, F. Novinics, M. Tallián, G. Borionetti, G. Guaglio, M. Pfeffer, E. Don
Microwave Photoconductive Decay (μ-PCD), C-PCD, corona charge, carrier lifetime
2009
ONO Program/Erase Performance Characterization for Variations in Tunnel Oxide and Nitride Films.
Kwame N Eason, Rinji Sugino, Amir Jafarpour, Bingbing Zhang, Duncan Rogers, Robert Ogle, John D'amico, Marshall Wilson
Silicon Nitride
2008
Band Offset Diagnostics of Advanced Dielectrics
P. Edelman, M. Wilson, J. D’Amico, A. Savtchouk, J. Lagowski
non-contact electrical metrology, Silicon (Si), mixed dielectrics, oxynitrides, hafnium silicates
2008
Digital SPV Diffusion Length Metrology (E8-Fe) for Ultra-High Purity Silicon Wafers
M. Wilson, A. Savtchouk, I. Tarasov, J. D’Amico, P. Edelman, N. Kochey, J. Lagowski
Minority Carrier Diffusion Length, surface photovoltage, iron detection in silicon wafers
2008
Photoelectric Method for Non-Contact Characterization of SiGe
E. Tsidilkovski, K. Steeples
Surface, photovoltage, Electronic properties, Strain, Multi-layer structure, Semiconductors, Characterisation
2008
Nanomechanical Properties of Ion-Implanted Si
P.M. Nagy, D. Aranyi, P. Horváth, G. Pető, E. Kálmán
nanoindentation, Ion Implantation, mechanical properties, AFM
2008
Determining of Sheet Resistance of Implanted Wafers with Technique of Non-Contact Junction Photovoltage Measurement
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2008
Junction Photovoltage Metrology and High Resolution Mapping of Ion Implants Electrically Isolated from Wafer Surface
F. Korsós, K. Kis-Szabó, E. Don, A. Pap, T. Pavelka, C. Laviron, M. Pfeffer
Metrology, annealing, Ion Implantation, active layer, doping
2008
Ultra Shallow Junctions fabrication by Plasma Immersion Implantation on PULSION® followed by Spike and/or Flash Annealing. Effect of pre-amorphization and co-implantation on Boron diffusion in Silicon
H. Etienne, F. Torregrosa, G. Semoere, G. Mathieu, L. Roux, F. Cristiano, P. Fazzini, W. Lerch, S. Paul, J. Gelpey, F. Milesi, F. Gonzatti, A. Pap, K. Kis-Szabo, T. Pavelka
amorphization, co-implantation, ultra-shallow junction (USJ), Hall effect measurements, SIMS, TEM
2008
Ultra‐Shallow Junctions Fabrication by Plasma Immersion Implantation on PULSION® Followed by Laser Thermal Processing
F. Torregrosa, H. Etienne, G. Sempere, G. Mathieu, L. Roux, V. Vervisch, P. Delaporte, T. Sarnet, A. Pap, K. Kis‐Szabó, T. Pavelka, C. Grosjean
plasma ion implantation, Ion Implantation, semiconductor junctions, annealing, boron
2008
Fabrication and Characterisation Challenges on Ultra Shallow Junctions for sub 45 nm CMOS Devices
F. Torregrosa, H. Etienne, G. Sempere, G. Mathieu, L. Roux, C. Grosjean, R. Daineche, Y. De Puydt, L. Dupuy, P. Galand, A. Pap, K. Kis-Szabo, T. Pavelka
ultra-shallow junction (USJ)
2008
Control of Laser Induced Interface Traps with In-line Corona Charge Metrology
J-L. Everaert, E. Rosseel, C. Ortolland, M. Aoulaiche, T. Hoffmann, T. Pavelka, E. Don
corona charge, in-line, traps
2008
Application of Micro Corona-Kelvin Technique to Non-contact Monitoring of High-k MOS Capacitors
Anton Belyaev, Marshall Wilson, Jacek Lagowski, Lubek Jastrzebski, Andrew Findlay, J Price, CS Park, Muhammad M Hussain, G Bersuker, PS Lysaght
Corona-Kelvin Metrology, Dielectrics, Non-Contact Measurement
2007
Determination of Activated Dopant Profiles with a Novel FastGate® Probe
R.J. Hillard, C. Win Ye, M.C. Benjamin, K. Suguro
probes, Electrical resistance measurement, Testing, Solid state circuits, MOSFETs, annealing, Shape, Contacts, Capacitance-voltage characteristics, Charge carrier density
2007
In-Line Non-Contact Micro-Kelvin Measurements Applied to ZrO2/Al2O3/ZrO2 Dielectric Stacks in the Active Capacitor Cell Areas of Advanced DRAM
J.H. Kim, C.H. Kim, H.W. Yoo, H.L. Kim, S.H. Son, C.H. Lee, T.K. Kim, J. D’Amico, M. Wilson, M. Wilson, S.H. Kim, S.H. Park
corona - Kelvin, DRAM production wafers, SASS, ZAZ dielectric
2007
Application of Non-contact Corona-Kelvin metrology for Characterization of Plasma Nitrided SiO2
A. Belyaev, D. Marinskiy, M. Wilson, J. D’Amico, L. Jastrzebski, J. Lagowski
corona - Kelvin, scribe lines, plasma nitridation, Dielectrics, tunneling, Valence bands, Electric measurements, Metrology
2007
Manifestation of Cu Impurities on Silicon Surfaces, Implication for Monitoring Cu Contamination
M. Wilson, A. Savtchouk, J. D’Amico, I. Tarasov, L. Jastrzebski, J. Lagowski
Copper (Cu), Contact Potential Difference (CPD), ac-surface photovoltage measurement
2007
NIST Traceable Small Signal Surface Photo Voltage Reference Wafer
A. Bertuch, K. Steeples
NIST traceable, surface photovoltage, standard, reference wafer, Electric measurements, Electrical resistivity, Metrology, Epitaxy, Silicon (Si)
2007
Real‐Time, High Resolution, Dynamic Surface Charge Wafer Mapping for Advanced Ion Implant Process Control
K. Gurcan, A. Bertuch, K. Steeples
micro-uniformity, Metrology, implant, surface photovoltage, high-resolution mapping, electrical test, Ion Implantation, Surface charge, Testing procedures, Critical currents
2007
Non-Contact Photoelectric Method For Thin SOI Characterization
E. Tsidilkovski, K. Steeples
Non-contact, photoelectric measurement, silicon film thickness, SOI
2007
Implant Metrology for Bonded SOI Wafers using a Surface Photo-Voltage Technique
A. Bertuch, W. Smith, K. Steeples, R. Standley, A. Stefanescu, R. Johnson
surface photovoltage, monitor, Ion Implantation, layer-transfer, SOI, wafer mapping, hydrogen and helium implants
2007
Non-Contact SPV-based Method for Advanced Ion Implant Process Control
F. Pennella, P. Pianezza, E. Tsidikovski, G. Krzych, K. Steeples
CMOS integrated circuits, annealing, Ion Implantation, photovoltaic effects, process control, semiconductor device manufacturing, semiconductor device measurement, voltage measurement, carrier lifetime
2007
Monitoring Plasma Nitridation of HfSiOx by Corona Charge Measurements
J-L. Everaert, X. Shi, A. Rothschild, M. Schaekers, E. Rosseel, T. Pavelka, E. Don, S. Vanhaelemeersch
HfSiO, Nitridation, corona charge, Gate dielectric, Gate leakage
2007
Three Dimensional Mapping of Thermal and Tunneling Electron Emission from InAs/GaAs Quantum Dots
O. Engström, M.Kaniewska, W.Jung, M.Kaczmarczyk
Deep level transient spectroscopy, quantum dots, tunneling, conduction bands, electric field
2007
Carrier Lifetime Measurements in Silicon for Photovoltaic Applications
T. Pavelka, A. Pap, Gy. Szilágyi
lifetime, Silicon (Si), photovoltaics
2007
Improvements to High Resolution Mapping of Junction Photovoltage Measured Sheet Resistance by Correcting for Wafer Edge and Compensating for Junction Leakage
E. Don, C. Kohn, A. Pap, P. Tüttő, T. Pavelka, C. Laviron, C. Wyon, R. Oechsner, M. Pfeffer
2007
High Resolution Mapping of Sheet Resistance Reveal Implanter or Anneal Non-Uniformities
C. Kohn, E. Don, P. Tüttő, A. Pap, T. Pavelka
sheet resistance, ultra shallow implants, junction photovoltage technique
2007
Metrology, Analysis and Charaterization in Micro- and Nanotechnologies - A European Challenge
L. Pfitzner, A. Nutsch, R. Oechsner, M. Pfeffer, E. Don, C. Wylon, M. Hurlebaus
Metrology, semiconductor manufacturing, equipment
2007
Determination of Implant Activation and Junction Leakage with a Non-Penetrating and Non-Damaging Elastic Material Probe (EM-Probe)
R.J. Hillard, M. Benjamin, J.O. Borland
implant activation, junction leakage, implant, activation, leakage, junction
2007
Determination of Activated Dopant Profiles with a Novel FastGate® Probe
R.J. Hillard, C. Win Ye, M.C. Benjamin, K. Suguro
doping profile, probes, semiconductor junctions
2006
Photoelectric Measurement Method For Implanted Silicon: A Phenomenological Approach
K. Steeples, E. Tsidilkovski
Silicon (Si), Metrology, photovoltage, defects, lifetime
2006
Surface Charge Profiling — An advancement in Ion Implant Monitoring
C. Krueger, C.H. Ng, Z. Zhao, G. Krytsch
Ion Implantation, Surface charge, High current technology
2006
45 nm Node p+ USJ Formation With High Dopant Activation And Low Damage
J. Borland, S. Shishiguchi, A. Mineji, W. Krull, D. Jacobson, M. Tanjyo, W. Lerch, S. Paul, J. Gelpey, S. McCoy, J. Venturini, M. Current, V. Faifer, R. Hillard, M. Benjamin, T. Walker, A. Buczkowski, Z. Li, J. Chen
boron, boron compounds, elemental semiconductors, Ion Implantation, laser beam annealing, semiconductor doping, semiconductor junctions, Silicon (Si), solid phase epitaxial growth
2006
Metrology and High Resolution Mapping of Shallow Junctions Formed by Low Energy Implant Processes
E. Don, A. Pap, T. Pavelka, P. Tüttő, C. Wyon, C. Laviron, R. Oechsner, M. Pfeffer
annealing, Electrical resistivity, Metrology, Spatial resolution
2006
Carrier Lifetime Mapping and Lifetime Studies of 4H-SiC Epilayers
J.D. Caldwell, P. B. Klein, O. Glembocki, K. Hobart, F. Kub, A. Pap, T. Pavelka, A. Shrivastava, Z. Zhang, T. Sudarshan, G. Webster
carrier lifetime, silicon carbide (SiC), epilayer
2006
The present status and recent advancements in corona-Kelvin non-contact electrical metrology of dielectrics for IC-manufacturing
Marshall Wilson, Dmitriy Marinskiy, Anton Byelyayev, John D'Amico, Andrew Findlay, Lubek Jastrzebski, Jacek Lagowski
Corona-Kelvin Metrology, Dielectrics, Non-Contact Measurement, semiconductor manufacturing
2006
Non-Contact Corona-Kelvin Based Metrology for High-k Dielectric Characterization with an Extension to Micro-Scale Measurement
C Almeida, A Byelyayev, J D Amico, A Findlay, L Jastrzebski, J Kochey, J Lagowski, D Marinskiy, A Savtchouk, M Wilson
corona charge, Corona-Kelvin Metrology, high-k dielectrics, Non-Contact Measurement
2005
Non-Contact Charge-Voltage Method for Dielectric Characterization on Small Test Areas of IC Product Wafers
P. Edelman, D. Marinskiy, C. Almeida, J.N. Kochey, A. Byelyayev, M. Wilson, A. Savtchouk, J. D’Amico, A. Findlay, L. Jastrzebski, J. Lagowski
Non-contact, CV, Scribe line testing, Advanced dielectrics, corona discharge, Kelvin force
2005
Quantitative Copper Measurement in Oxidized p-Type Silicon Wafers using Microwave Photoconductivity Decay
H. Vainola, E. Saarnilehto, M. Yli-Koski, A. Haarahiltunen, J. Sinkkonen, G. Berenyi, T. Pavelka
Copper (Cu), illumination, precipitation, Silicon (Si), annealing
2005
Measurement of Copper in p-Type Silicon using Charge-Carrier Lifetime Methods
M. Yli-Koski, H. Savin, E. Saarnilehto, A. Haarahiltunen, J. Sinkkonen, G. Berenyi, T. Pavelka
Copper (Cu), Silicon (Si), surface photovoltage, Microwave Photoconductive Decay (μ-PCD)
2005
Determination of electrically Active Surface Dopant Density in Ultra-Shallow Junction (USJ) Structures with a Non-Destructive Elastic Material Probe (EM-Probe)
R.J. Hillard, M.V. Benjamin, W.C. Ye, J.O. Borland
surface dopant density, ultra-shallow junction (USJ), elastic material probe
2005
Recent Developments in Electrical Metrology for MOS Fabrication
R.J. Hillard, M.C. Benjamin, G.A. Brown
Metrology, MOS
2005
Microwave Photoconductive Decay Mapping and Investigation of Lifetimes in 4H-SiC Epitaxial Layers
J.D. Caldwell, A. Pap, A. Shrivastava, Z. Zhang, P.B. Klein, T. Pavelka, T. Sudarshan, O.J. Glembocki, K. Hobart, F. Kub
silicon carbide (SiC), photoconductive decay, epitaxial layer
2005
Ultra Low Energy (ULE) Implant Dose & Activation Monitoring
J. Borland, R. Hillard, M. Benjamin, E. Gurer
implant dose, activation monitoring, implant, activation
2005
Self‐calibrating Approach for Non‐Contact Electrical Doping Profiling
D Marinskiy, P Edelman, C Almeida, G Polisski, J D’Amico, M Wilson, L Jastrzebski, J Lagowski
depth profile, doping, Electrical properties, Epitaxial silicon, Kelvin probe, semiconductor, semiconductor epitaxial layers
2005
Making Use of Silicon Wafers with Low Lifetimes by Adequate POCl3 Diffusion
J. Lossen, L. Mittelstadt, S. Dauwe, K. Lauer, C. Beneking
carrier lifetime, POCl3, diffusion
2004
Mapping of Minority Carrier Diffusion Length and Heavy Metal Contamination with Ultimate Surface Photovoltage Method
J. Lagowski, A. Aleynikov, A. Savtchouk, P. Edelman
surface photovoltage, Minority Carrier Diffusion Length
2004
Non-Contact C-V Measurements of Ultra Thin Dielectrics
P. Edelman, A. Savtchouk, M. Wilson, J. D'Amico, J.N. Kochey, D. Marinskiy, J. Lagowski
non-contact C-V, ultra-thin dielectrics, Silicon (Si)
2004
Ion Implant Process Monitoring with a Dynamic Surface Photo-Charge Technique
E. Tsidilkovski, K. Crocker, K. Steeples
CMOS integrated circuits, arsenic, boron, Ion Implantation, process monitoring, surface photovoltage
2004
Investigation of High-K Dielectric Properties with the Non-Contact SASS Technique
M. Wilson, J. Lagowski, J. D'Amico, P. Edelman, A. Savtchouk
High dielectric constant materials, Materials science, High-k gate dielectrics
2004
Measurements of Ultra-Shallow Junction (USJ) Sheet Resistance with a Non-Penetrating Four Point Probe
R.J. Hillard, R.G. Mazur, W.J. Alexander, C. Win Ye, M.C. Benjamin, J.O. Borland
sheet resistance, 4pp, ultra-shallow junction (USJ)
2004
Accurate Determination of Ultra-Shallow Junction Sheet Resistance with a Non-Penetrating Four Point Probe
R.J. Hillard, J. Borland, C. Win Ye
sheet resistance, 4pp, ultra-shallow junction (USJ)
2004
Accurate Determination of Ultra-Shallow Junction Sheet Resistance with a Non-Penetrating Four Point Probe
R.J. Hillard, C. Win Ye, L. Tan, M.C. Benjamin, R.G. Mazur
sheet resistance, 4pp, ultra-shallow junction (USJ)
2004
First Results of the Solarcentre Erfurt - a New Pertner in Photovoltaic Research
S. Dauwe, L. Mittelstadt, A. Lawerenz, H.J. Freitag,C. Beneking, H. Aulich
Fourier transform infrared spectroscopy, Microwave-induced photoconductance decay, Light beam induced current mapping, Spectral Response
2003
Non-contact Doping Profiling in Epitaxial SiC
A. Savtchouk, E. Oborina, A.M. Hoff, J. Lagowski
doping, Non-Contact Measurement, silicon carbide (SiC)
2003
Non-Contact Electrical Doping Profiling
D. Marinskiy, J. Lagowski, J. D’Amico, A. Findlay, L. Jastrzebski
doping, Mercury (element), Capacitance, Electric measurements, Semiconductor surfaces
2003
Non‐Contact C‐V Technique for high‐k Applications
P. Edelman, A. Savtchouk, M. Wilson, J. D’Amico, J.N. Kochey, D. Marinskiy, J. Lagowski
Dielectrics, Adsorption, Capacitance, Contact potential, Metal insulator semiconductor structures
2003
In‐line, Non‐destructive Electrical Metrology of Nitrided Silicon Dioxide and High‐k Gate Dielectric Layers
R.J. Hillard, P.Y. Hung, W. Chism, C.W. Ye, W.H. Howland, L.C. Tan, C.E. Kalnas
Dielectrics, Dielectric thin films, Electrical properties, Elasticity, Dielectric properties
2003
Silicon Epitaxial Layer Recombination and Generation Lifetime Characterization
D.K. Schroder, B.D. Choi, S.G. Kang, W. Ohashi, K. Kitahara, G. Opposits, T. Pavelka, J. Benton
MOS capacitors, carrier lifetime, electron-hole recombination, semiconductor device measurement, semiconductor epitaxial layers, Silicon (Si), space-charge limited conduction
2003
Determination of Metallic Impurities in a Silicon Wafer by Local Etching and Electrothermal Atomic Absorption Spectrometry
H-Y. Chung, S-H Lee, Y-H. Kim, K-S. Lee, D-H. Kim
metallic impurities distribution, etching technique, ET-AAS
2003
Improvements in PV Performance and Yield (INSPIRE) Report of a Project Carried out Under the DTI's New and Renewable Energy Programme
B.J. Garrard
cruicible hot filling, growth of large ingots, recycling of silicon ingots
2003
Comparative Study on Emitter Sheet Resitivity Measurements for Inline Quality Control
E. Rüland, P. Fath, T. Pavelka, A. Pap, K. Peter, J. Mizsei
diffusion, eddy current testing, Electrical resistivity, elemental semiconductors, phosphorus, quality control, Silicon (Si), solar cells, surface photovoltage
2002
Full Wafer Non-Contact Mapping of Electrical Properties of Ultra-Thin Advanced Dielectrics on Si
P. Edelman, J. Lagowski, A. Savtchouk, M. Wilson, A. Aleynikov, D. Marinskiy, J. Navarro
Dielectrics, leakage, Oxide thickness, Non-contact, Mapping, corona
2002
Cleaning of Si Surfaces by Lamp Illumination
A. Danel, C.L. Tsai, K. Shanmugasundaram, F. Tardif, E. Kamieniecki, J. Ruzyllo
Lamp cleaning, Organic contamination, Volatile contaminants, hydrocarbons
2002
Product Wafer Monitoring of Ultra-Shallow Channel Implants with an Elastic Metal Gate (EM-gate)
R.J. Hillard, W.H. Howland, R.G. Mazur, W. Ye, N.K. Variam
MOSFET, carrier density, doping profile, Ion Implantation, process monitoring, semiconductor device measurement
2002
Contactless Surface Charge Semiconductor Characterization
D.K. Schröder
Silicon (Si), Electric measurements, Metal–insulator–semiconductor structures, Surface and interface states, Contact potential, Work function, Epitaxial silicon
2002
Detection of Low-Level Copper Contamination in p-Type Silicon by Means of Microwave Photoconductive Decay Measurements
M. Yil-Koski, M. Palokangas, A. Haarahiltunen, H. Vainöla, J. Storgards, H. Holmberg, J. Sinkkonen
recombination of copper, Microwave Photoconductive Decay (μ-PCD), high-intensity bias light, interstitial copper, Ham's kinetics, Si–SiO2 interface
2001
Non Contact Surface Potential Measurements for Charging Reduction During Manufacturing of Metal-Insulator-Metal Capacitors
J. Ackaert, Z. Wang, E. De Backer, P. Colson, P. Coppens
charging induced damage (CID), metal-insulator-metal-capacitor (MIMC)
2001
SPV Monitoring of Near Surface Doping – Role of Boron-Hydrogen Interaction; Boron Passivation and Reactivation
D. Marinskiy, J. Lagowski
Hydrogen, passivation, boron acceptor, wet etching, reactive ion etching, sputter deposition, metal contacts, Ar ion beam etching
2001
Carrier Lifetime Analysis by Photoconductive Decay and Free Carrier Absorption Measurements
H-J. Schulze, A. Frohnmeyer, F.-J. Niedernostheide, F. Hille, P. Tüttő, T. Pavelka, G. Wachutka
Silicon (Si), elemental semiconductors, carrier lifetime, photoconductivity
2001
Surface Passivation Effect of Silicon Substrates due to Quinhydrone/Ethanol Treatment
H. Takato, I. Sakata, R. Shimokawa
surface passivation, quinhydrone/ethanol treatment, Microwave Photoconductive Decay (μ-PCD)
2001
Process Induced Oxide and Interface Charges and their Reactivity with Carriers in Bulk Silicon
J.E. Steinle
lifetime measurements, metal contamination, crystal defects, modified techniques, oxide quality
2001
Reflection Mode Scanning Infrared Microscope (SIRM) and its Applications to Defect Detection in Silicon (Scanning Infrared Microscope and Its Application in Silicon)
Cs. Kovacsics
2000
Relationship Between Yield and Reliability Impact of Plasma Damage to Gate Oxide
P.W. Mason, D.K. DeBusk, J.K. McDaniel, A.S. Oates, K.P. Cheung
integrated circuit reliability, integrated circuit yield, Plasma materials processing
2000
COCOS (Corona Oxide Characterization of Semiconductor) Non-Contact Metrology for Gate Dielectrics
M. Wilson, J. Lagowski, L. Jastrzebski, A. Savtchouk, V. Faifer
COCOS, Dielectrics, Semiconductor device characterization, Dielectric thin films, Electric measurements, Contact potential
2000
Non-contact Thickness and Electrical Characterization of High-k Dielectrics
A.F. Bello, S. Kher, D. Marinskiy
high-k dielectrics, BST, picosecond ultrasonics, COCOS, Electric measurements, Capacitance, Dielectric constant, Dielectric thin films
2000
Small Signal ac-Surface Photovoltage Technique for Non-Contact Monitoring of Near Surface Doping for IC-processing
D. Marinskiy, J. Lagowski, M. Wilson, L. Jastrzebski, R. Santiesteban, K. Elshot
surface photovoltage, surface doping, Ion Implantation, doping, Electrodes, Oxides, Reflectivity, Silicon (Si), Capacitance, Diagnostics
2000
Non-contact, In-line Monitoring of Low Dose and Low Energy Ion Implantation
R.S. Santiesteban, D.K. DeBusk, D.A. Ramappa, W.M. Moller
boron, doping profile, elemental semiconductors, Ion Implantation, process monitoring, Silicon (Si), surface photovoltage
2000
Qualification of Epi Layers and Interface Properties by an Improved µ-PCD Technique
T. Pavelka, D.C. Gupta and G.A. Brown
Silicon (Si), epitaxial wafer, carrier lifetime, surface/interface recombination velocity
2000
Investigation of Deep Levels and Precipitates Related to Molybdenum in Silicon by DLTS and Scanning Infrared Microscopy
B. Sandhu, T. Ogikubo, H. Goto, V. Csapó, T. Pavelka
DLTS, SIRM, Silicon (Si), Mo, Fe, deep levels, carrier lifetime
2000
Analytical Tools for the Characterization of Power Devices
H-J. Schulze, A. Frohnmeyer, F-J. Niedernostheide, B. Simmnacher, B.O. Kolbesen, P. Tüttő, T. Pavelka, G. Wachutka
transition metals, contamination, carrier lifetime, silicon defect density
2000
Carrier Lifetime Control and Characterization of High-Resistivity Silicon Used for High-Power Devices
H-J. Schulze, A. Frohnmeyer, F-J. Niedernostheide, F. Hille, P. Tüttő, T. Pavelka, G. Wachutka
carrier lifetime, Silicon (Si), high power device
2000
Lifetime mapping of Si Wafers by an Infrared Camera
M. Bail, J. Kentsch, R. Brendel, M. Schulz
carrier lifetime, infrared camera
1999
Detection of Copper Contamination in Silicon by Surface Photovoltage Diffusion Length Measurements
W.B. Henley, D.A. Ramappa, L. Jastrezbski
Copper (Cu), Silicon (Si), diffusion, carrier lifetime, iron
1999
Effects of Copper Contamination in Silicon on Thin Oxide Breakdown
D.A. Ramappa, W.B. Henley
copper contamination, breakdown, reliability, thin silicon gate oxide
1999
Diffusion of Iron in Silicon Dioxide
D.A. Ramappa, W.B. Henley
diffusion, iron, silicon dioxide
1999
Small Signal AC-Surface Photovoltage Technique for Non-Contact Monitoring of Near Surface Doping and Recombination-Generation in the Depletion Layer
D. Marinskiy, J. Lagowski, M. Wilson, A. Savtchouk, L. Jastrzebski, D. DeBusk
Small signal non-contact ac-SPV, near surface doping (NSD), chopping frequency, submicron penetration depth
1999
COCOS (Corona Oxide Characterization of Semiconductor) Metrology: Physical Principles and Applications
M. Wilson, J. Lagowski, A. Savtchouk, L. Jastrzebski, J. D'Amico
COCOS, corona, Interface Trap, stress induced leakage current, iron contamination, Contact Potential Difference (CPD)
1999
New COCOS (Corona Oxide Characterization of Semiconductor) Method for Monitoring the Reliability of Thin Gate Oxides
M. Wilson, J. Lagowski, A. Savtchouk, L. Jastrebski, J. D'Amico, D.K. DeBusk, A. Buczkowski
COCOS, Interface structure, surface treatment, Corona effect, Voltage current curve, reliability, Oxide layer, Defect detection, Comparative study, Experimental result, Waveform
1999
A Novel Pretreatment for Thin-Film Measurements
A. Danel, F. Tardif, E. Kamieniecki
Rapid Optical Surface Treatment (ROST), hydrocarbons, ellipsometry
1999
Epilayer Quality and Yield Improvement Using the Surface Charge Profiler as a Non-Destructive Diagnostic Technique
M.C. Nguyen, J.P. Tower, A. Danel
semiconductor materials
1999
Using the Surface Charge Profiler for In-Line Monitoring of Doping Concentration in Silicon Epitaxial Wafer Manufacturing
J.P. Tower, E. Kamieniecki, M.C. Nguyen, A. Danel
doping, Silicon (Si), Wafer manufacturing, Epitaxy
1999
Fast Noncontact Diffusion-Process Monitoring
D.K. DeBusk, A.M. Hoff
noncontact metrology, surface photovoltage, Contact Potential Difference (CPD), COCOS
1999
Gettering of Unintentionally Contaminated Silicon Wafers by Phosphorous Ion Implantation and Annealing
M. Yli-Koski, J. Mellin, V. Ovchinnikov
Gettering, Phosphorous Ion Implantation, Silicon (Si), surface photovoltage
1999
Lifetime Measurements in SOI and Epi Structures
T. Pavelka, Z. Batari
lifetime, SOI, EPI
1999
Determination of Recombination Center Parameters by the Combined Application of µ-PCD and SPV Techniques
T. Pavelka, A. Tóth, G. Bayer
recombination center, Microwave Photoconductive Decay (μ-PCD), surface photovoltage
1999
Temperature Dependence of Carrier Recombination Lifetimes in n-Type Silicon
A. Frohnmeyer, F.-J. Niedernostheide, H.-J. Schulze, P. Tüttő, T. Pavelka, G. Wachutka
1999
Evaluation of Advanced Pre-Gate Cleanings
C. Cowache, P. Boelen, I. Kashkoush, P Besson, F. Tardif
pre-gate cleaning, particle removal, metal removal, surface microroughness, surface passivation
1999
Effect of Fe and Cu contamination on the reliability of ultrathin gate oxides
John D'Amico, Lubek Jastrzebski, Marshall Wilson, Alexandre Savtchouk
COCOS, heavy metal contamination
1999
Study of stress-induced leakage current in thin oxides stressed by corona charging in air: relationship to GOI defects
M Wilson, J Lagowski, A Savtchou, D Marinskiy, L Jastrzebski, J D'amico
corona charge, defect inspection, Non-Contact Measurement
1998
Use of Non-Contact Resistivity Measurements for Epitaxy: Surface Charge Profiler Method
A. Danel, F. Tardif, G. Kamarinos, M.C. Nguyen
high purity silicon, Surface Charge Profiler (SCP), Doping measurements
1998
Surface Dopant Concentration Measurement using the Surface Charge Profiler (SCP) Method: Characterization of Hydrogen and Metallic Contamination in Silicon
A. Danel, F. Tardif, G. Kamarinos
Doping deactivation, Surface Charge Profiler (SCP), Boron-doped silicon, Hydrogen, Copper (Cu)
1998
Present Status of the Surface Photovoltage Method (SPV) for Measuring Minority Carrier Diffusion Length and Related Parameters
P. Edelman, V. Faifer, J. Lagowski
surface photovoltage, Minority Carrier Diffusion Length, iron contamination, recombination lifetime
1998
Problems and Possibilities of Comparing Different Lifetime Measuring Instruments and Techniques
T. Pavelka, D.C. Gupta, F.R. Bacher, W.M. Hughes
carrier lifetime, surface photovoltage, Microwave Photoconductive Decay (μ-PCD), injection level, surface recombination, surface passivation
1998
Threshold voltage control (VT)of sub-0.25 μm processes using mercury gate MOS capacitors
RJ Hillard, RG Mazur, JC Sherbondy, L Peitersen, M Wilson, R Herlocher
Electrical properties, mercury probe, Oxides, semiconductor
1998
Contact potential difference methods for full wafer characterization of Si/SiO2 interface defects induced by plasma processing
Piotr Edelman, A Savchouk, M Wilson, Lubek Jastrzebski, Jacek J Lagowski, Christopher Nauka, Shawming Ma, Andrew M Hoff, Damon K DeBusk
COCOS, defects, full wafer mapping, Interface, Non-Contact Measurement, surface doping
1997
Correlation Of Nitride Spacer Plasma Damage Results From Conventional Gate Capacitor Electrical Tests And A New, Non-contact Approach
M.W. Goss, A. Findlay
Capacitors, etching, Plasma applications, Plasma devices, Plasma diagnostics, Plasma materials processing, Plasma measurements, Plasma stability, Pulse measurements, Testing
1997
Monitoring of Mobile Sodium Ions in SiO2 Using Corona Charging
F.A. Stevie, E. Persson, D.K. DeBusk, A. Savchuk, A.M. Hoff, P. Edelman, J. Lagowski
mobil charge, corona temperature stress, SiO2, corona charge
1997
Charge Carrier Lifetime Modification in Silicon by High Energy H+, He+ Ion Implantation
N.Q. Khanh, P. Tüttő, E.N. Jaroli, O. Buiu, L.P. Bíró, F. Pászti, T. Mohácsy, Cs. Kovacsics, A. Manuaba, J. Gyulai
Charge Carrier Lifetime, Excess Charge Pocket, Ion Implantation, Lifetime Tailoring, Microwave Photoconductive Decay (μ-PCD), Radiation Damage, Recombination Activity
1997
Charge Carrier Lifetime Modification in Silicon by High Energy H+ or He+ Ion
N.Q. Khanh, P. Tüttő, E.N. Jaroli, O. Buiu, L.P. Bíró, A. Manuaba, J. Gyulai
carrier lifetime, Silicon (Si), Ion Implantation
1997
Process Monitoring of Ultrathin Oxides using Surface Charge Analysis
A.H. Field
surface charge analysis, VQ, Oxides, contamination, doping, Integrated circuits, Interfaces
1997
Monitoring of Noble Metals in HF Based Chemistries by u-PCD, SPV, SCI and SCP
A. Daniel, U. Straube, G. Kamarinos, E. Kamieniecki, F. Tradif
Microwave Photoconductive Decay (μ-PCD), surface photovoltage, SCI, SCP, noble metal
1996
A Novel Method For Studying Degradation Related To Plasma Processing Of Silicon Wafers
J. Lagowski, A. Hofl, L. Jastrzebski, P. Edelman, T. Esry
oxide potential, surface photovoltage, plasma damage, dielectric charge, Radiation Damage, heavy metal contamination
1996
Monitoring Plasma Damage: A Real-Time, Noncontact Approach
A.M. Hoff, T.C. Esry, K. Nauka
plasma damage, dielectric charge, Radiation Damage, heavy metal contamination
1996
Identification Possibility of Metallic Impurities in p-Type Silicon by Lifetime Measurement
T.S. Horányi, P. Tüttő, Cs. Kovacsics
oxidation, Silicon (Si), temperature, nitrogen compounds, oxygen compounds, quartz, surface treatment
1996
New Possibilities for the Microwave Photoconductive Decay Technique
T. Pavelka
Microwave Photoconductive Decay (μ-PCD)
1995
New Surface Photovoltage (SPV) Method for High Precision Measurement of the Minority Carrier Diffusion Length and Surface Recombination Velocity in Silicon Wafers
V. Faifer, P. Edelman, A. Kontkiewicz, J. Lagowski, A. Hoff, V. Dyukov, A. Pravdivtsev, I. Kornienko
surface photovoltage, Minority Carrier Diffusion Length, surface recombination velocity, Silicon (Si)
1995
Monitoring of Fe Contamination on Si Surfaces Using Non-Contact Surface Charge Profiler
P. Roman, I. Kashkoush, R.E. Novak, E. Kamieniecki, J. Ruzyllo
Surface Charge Profiler (SCP), Fe concentration, Si surfaces, Non-Contact Measurement
1995
Element Specific Diagnosis Using Microwave Reflection Photoconductive Decay
L. Köster, P. Blöchl, L. Fábry
element specific drive-in treatments, Microwave Photoconductive Decay (μ-PCD), metal contamination, injection level, Schockley-Read-Hall-recombination model
1993
Method for the Measurement of Long Minority Carrier Diffusion Lengths Exceeding Wafer Thickness
J. Lagowski, A.M. Kontkiewicz, L. Jastrzebski, P. Edelman
diffusion, Silicon (Si), Surface measurement
1993
Iron Detection in the Part per Quadrillion Range in Silicon Using Surface Photovoltage and Photodissociation of Iron‐Boron Pairs
J. Lagowski, P. Edelman, A.M. Kontkiewicz, O. Milic, W. Henley, M. Dexter, L. Jastrzebski, A.M. Hoff
iron, dissociation, photodissociation, Silicon (Si), diffusion
1993
Monitoring of Heavy Metal Contamination During Chemical Cleaning with Surface Photovoltage
L. Jastrzebski, O. Milic, M. Dexter, J. Lagowski, D. DeBusk, K. Nauka, R. Witowski, M. Gordon, E. Persson
contamination, chemical analysis, photovoltaic cells, surface dynamics, integrated circuit design
1993
Ballistic Electron Emission Microscopy of Schottky Diodes on RF-Plasma-Treated Silicon
L. Quattropani, K. Solt, P. Niedermann, I. Maggio-Aprile, O. Fischer, T. Pavelka
Schottky diode, RF plasma treated silicon
1993
Electrochemical Etching and Profiling of Silicon
T.S. Horányi, P. Tüttő
etching, profiling, Silicon (Si)
1993
In Situ Bulk Lifetime Measurement on Silicon with a Chemically Passivated Surface
T.S. Horányi, T. Pavelka, P. Tüttő
lifetime, Silicon (Si), passivated surface
1993
Investigation of Recombination Properties of Ti Double Donor in Silicon
G. Ferenczi, T. Pavelka, P. Tüttő, L. Köster
recombination, Ti donor, Silicon (Si)
1993
A New Method for Simultaneous Characterisation of Process Cleanliness and True Particle Removal Efficiency
N.E. Henelius, H. Ronkainen, O.J. Anttila, J.M. Molarius
cleaning technology, semiconductor device manufacturing, electrochemical, electronics, dielectric science
1991
Injection Level Spectroscopy: A Novel Non-Contact Contamination Analysis Technique in Silicon
G. Ferenczi, T. Pavelka, P. Tüttő
contamination analysis, Silicon (Si)
1991
Improved Method for Depth Profiling of Multilayer Structures
T.S. Horányi, P. Tüttő, G. Endrédi
depth profile, multilayer structure
1991
Electrochemical Method for the Measurement of Doping Profiles in Silicon
T.S. Horányi, P. Tüttő, G. Endrédi
doping profile, Silicon (Si)
1990
DLTS Investigation of Deep Levels in Bulk GaAs under Uniaxial Stress
C.A. Londos, T. Pavelka
DLTS, GaAs
1989
Temperature Dependence of the Capture Cross Section of Seo as Measured by Microwave Absorption Spectroscopy (MAS)
T. Pavelka and B. Hemm
Microwave Absorption Spectroscopy
1989
Interpretation of the Electric Field Dependent Thermal Emission Data of Deep Traps
T. Pavelka and G. Ferenczi
Thermal emission, deep trap
1989
Dispersive Microwave Transient Spectroscopy of Deep Levels in Semiconductors
D. Huber, P. Eichinger, G. Ferenczi, T. Pavelka, G. Veszely
Microwave transient spectroscopy, deep levels, semiconductor