SE-2000 Spectroscopic Ellipsometer

SE-2000 features the widest spectral range available on a single tool. The ranging is from the deep UV (190 nm) up to mid-IR (25 μm). The tool is uniquely offered with an optional FTIR ellipsometer head on the same goniometer with the visible arms. It can be configured with the fast detection mode by using spectrograph and detector array, with the high resolution mode by using spectrometer and single point detectors, or with both modes together on the same tool. SE-2000 includes Semilab’s new smart electronics with interchangeable components, and operates with the new generation operating and analysis software (SAM / SEA). The system can be controlled from a PC or laptop through LAN network, or by a new touch panel interface.

Measurement modes:

• Spectroscopic Ellipsometry for thin film thickness and optical functions, including complex multilayer structures
• Generalized Ellipsometry for anisotropic materials
• Transmission Ellipsometry for transparent substrates
• Scatterometry vs. wavelength and angle of incidence
• Mueller Matrix (11 or 16 elements) uniquely offered in combination with Scatterometry for 3D anisotropic materials
• Jones Matrix for simple anisotropic materials
• Reflectance & Transmittance vs. wavelength and incidence angle
• Polarimetry
• Porosimetry: Measurements of pore size and porosity in thin films
• In situ measurement mode for real time control during deposition or etch process

Options:

• Mapping stage (X, Y, Z, rotation), manual or automatic
• Microspot (standard and ultra small - customization is subject to discussion)
• Environmental cells: cryostat, liquid cell, cooling and heating sample stage cells, QCM cell
• Atmospheric porosimetry chamber
• Visualization camera
• Spectroscopic Reflectometer
• Extended spectral range detection
• Possibility of integration of other Semilab metrologies (4pp, Eddy, etc.)