SE-1000 Spectroscopic Ellipsometer - Tabletop Manual System

SE-1000 provides modularity and high measurement performance in a compact table top footprint. This cost-efficient tool includes manual goniometer and manual sample positioning suitable for R&D laboratories. It performs non-contact and non-destructive optical measurements on substrates, single layer and multi-layer samples to obtain individual thin film thickness and optical properties. SE-1000 includes Semilab’s new smart electronics with interchangeable components, and operates with the new generation operating and analysis software (SAM / SEA). The system can be controlled from a PC or laptop through LAN network, or by a new touch panel interface.

Measurement modes:

• Spectroscopic Ellipsometry with rotating compensator
• Generalized Ellipsometry for anisotropic samples
• Mueller matrix 11 coefficients
• Jones matrix
• Porosimetry: Measurements of pore size distribution and porosity in thin films
• In situ measurement mode for real time control during deposition or etch process
   

Options:

• Microspot
• Near-infrared spectral extension
• Atmospheric thin film Porosimetry
• Liquid cell cooling and heating stages
• Visualization camera
• Spectroscopic reflectometer
• Liquid cell, cooling and heating stages