MBM-2201 Non-Contact Mobility and Sheet Resistance Metrology System

MBM-2201 is the ultimate choice for characterizing the conductive properties of compound semiconductors on the entire sample surface. It provides a non-destructive and non-contact method that characterizes mobility based on RF reflectance and a permanent magnet; and sheet resistance using Eddy Probe measurement of samples up to 200 mm sample sizes.

Improved measurement ranges

• Wide measurement ranges with excellent repeatability

Platform

• Auto-loading of 4"-5" or 6"-8" samples,
• Dual loading station for automatic sample load from open cassettes
• Manual loading of 3” samples
• 200 mm mapping stage
•  Designed for ISO Class 1 cleanroom without FFU
•  SAM2 based software compliant to SEMI^® standard

Options

• SECS/GEM communication capability
• Ionizer
• OCR capability for transparent samples
• Calibration setup wafers