We are pleased to release the new generation of Semilab Spectral Photoluminescence Metrology family, designed for diverse inline process monitoring needs with versatile measurement solutions, advanced analysis capabilities enabling real-time quality control of compound (SiC, GaN, LED, etc.) samples up to 300mm. To probe the optical and electronic structure of different materials, the SPL systems perform non-contact, non-destructive measurements combining spectral photoluminescence (PL), spectroscopic reflectometry (SR), and bow/warp measurement.

Power & RF device makers and compound wafer makers may also benefit from the SPL systems’ advanced analysis capability, as SEMI® standard compliant metrology software allows advanced recipe creation, display, and pattern recognition as well.

The Semilab SPL systems are fulfilling industrial standards with their fully automated spectrograph and laser power calibration routines to assure better stability of main components.

Contact us and level up your quality control process with Semilab SPL systems.