Semilab presents the EIR-3000 and EIR-2200 for thick dielectric monitoring


Semilab, a leading supplier in metrology solutions for semiconductor manufacturing, is pleased to release a new set of applications for its existing EIR which is addressing FTIR market for the semiconductor industry. This new release includes Dielectric composition (BPSG, FSG, SiN-H) with the benefit of reducing the cost of monitoring by reducing wafer requirements.

This new release is part of an ongoing expansion of SEMILAB tools and capabilities to address broader market and applications to the IC market.

We are excited to bring this new capability to our tool, which we believe will help our customers to simplify their calibration routine, improve overall long-term stability and reduce monitoring cost.