We are pleased to release PMR-2200C, the new generation of Semilab PMR family, designed mainly for SiC Implant Monitoring, with performance over large dose range and high sensitivity for differences in implantation temperature to give accurate feedback of the SiC crystal.

PMR-C is an inline, non-destructive technique for monitoring various implant parameters, like dose, tilt angle and implant temperature, of pre-annealed SiC monitor and product wafers and Si monitor wafers with pattern recognition capability. PMR-C systems provide excellent sensitivity in low implantation doses by monitoring implant temperature differences with high precision in wide measurement ranges.

The new system is ready to meet the needs of Power & RF device maker members with versatile available configurations, including 4-8” sample compatibility, various load port options and longer laser lifetime. 

Contact us and level up your Ion Implantation Process Control process with Semilab PMR-C systems.