Semilab’s QC platforms (Near Surface Doping Mappers) for epitaxial monitoring are the only non-contact, non-destructive, high throughput systems that can reliably map near surface doping on process wafers.
Features:
QC-2200e | QC-2500e | QC-3000e | |
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Wafer size | up to 200 mm |
up to 300 mm |
up to 300 mm |
Platform | Full hand-off automated | Full hand-off automated | Full hand-off automated |
Load port | 1 loadport / FOUP | 1 loadport / FOUP | 2 loadports / FOUP |
Primary applications:
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Equipments: | Measurement parameters: | Measurable wafer types: |
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