PMR-3000S Ion Implant Dose Monitor S

Based on significant improvements, the Semilab PMR-3000S enables in-line monitoring of implant processes on product wafers for immediate, accurate, and low-cost production control of implant systems and in-line monitoring for pre-anneal implant.

Features and System specifications:

• Implant dose
  • Species As, B, P, BF₂, In, Sb, C (application for other species under development)
• Process requirements - Unannealed implanted layers, Surface oxide
• Fully SEMI-compliant (300 mm) automation
• Overhead transport (OHT) available
• Fully compliant to Tier 1 contamination specs, including Class 1 mini-environment
• Two FOUPs capable of handling wafers up to 300 mm size
• State of the art software:
  • Recipe-based operation
  • Host communication
  • Different access levels
• Pattern recognition option