WT-2000 Wafer Tester - Tabletop System
The WT-2000 is a powerful tabletop measurement platform for performing many different semiconductor material characterization measurements. The base system includes all the overhead functions necessary to perform characterization measurements, including power supplies, computer and operating software, X-Y measurement stage and so on. It is typically used to make maps, where the wafer is scanned at a programmable raster. The WT-2000 can also perform measurements at specific, programmable measurement locations.
The WT-2000 is suggested for mid-range fabs and laboratories.
Features and System specifications:
- Wafer size: up to 300 mm with bare or dielectric coated surface
- Wafer handling: manual or Semilab-made indexer
- Loading options:
- 100-200 mm cassette indexer
- 300 mm 13 slot cassette indexer, including open cassettes for 100-300 mm wafers
- 300 mm 25 slot cassette indexer, including FOUP, FOSB, and open cassettes for 100-300 mm wafers
- Samples: np junction (implanted, annealed)
- Automation software with SECS/GEM communication option for non 300 mm standards.
- Factory automation: SECS/GEM for not 300 mm standards
Each system can be configured based on the user’s requirements by adding measurement capabilities and automation capabilities described below.
Measurement capabilities:
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