LEI-1616AM, LEI-1618AM, LEI-1616RP, LEI-1618RP

The LEI-1616 is ideal for both R&D and volume production of RF devices.

A permanent magnet allows for measurement of mobility as low as 100 cm2/V-s. Sheet resistance of 100-3000+ Ohm/sq is measurable.

The AM is manually loaded and automatically mapped. It accommodates 50-200 mm wafers.

The LEI-1618 adds an integrated eddy current head for improved precision of sheet resistance.

The RP is robotically loaded and accommodates either 50-150 mm or 76-200 mm wafers (option chosen at system build).

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