COREMA-2000 Contactless Resistivity Mapper

Semilab's COREMA-2000 system is based on a contactless capacitance technique used for precise resistivity characterization of semi-insulating compound semiconductors over a wide resistivity range, useful for the device manufacturing industry.

Knowing the uniformity of resistivity and mobility values is critical to achieve process optimization.
Mapping is critical for semi-insulating semiconductor QA processes as they show inhomogeneities that occur during manufacturing

Application

• Measures compound semiconductors: GaAs, SiC, GaN, CdTe, InP
• Resistivity measurement of compound semiconductors over a wide range (1x10⁵-1x10¹² Ωcm)

Features

• Manual wafer handling up to 200 mm
• Mapping capability
• Colored topogram display of full wafer
• Semi-automatic pneumatic placement
• User-friendly measurement control software

Benefits

• Contactless, non-destructive measurement over the entire wafer surface
• Fast evaluation
• Excellent repeatability
• No calibration necessary