COREMA-2000 Contactless Resistivity Mapper

Semilab's COREMA-2000 system is based on a contactless capacitance technique used for precise resistivity characterization of semi-insulating compound semiconductors over a wide resistivity range, useful for the device manufacturing industry.

Knowing the uniformity of resistivity and mobility values is critical to achieve process optimization.
Mapping is critical for semi-insulating semiconductor QA processes as they show inhomogeneities that occur during manufacturing


  • Measures compound semiconductors: GaAs, SiC, GaN, CdTe, InP
  • Resistivity measurement of compound semiconductors over a wide range (1x105-1x1012 Ωcm)


  • Manual wafer handling up to 200 mm
  • Mapping capability
  • Colored topogram display of full wafer
  • Semi-automatic pneumatic placement
  • User-friendly measurement control software


  • Contactless, non-destructive measurement over the entire wafer surface
  • Fast evaluation
  • Excellent repeatability
  • No calibration necessary

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