Semilab presents the EIR-3000 and EIR-2200
07.02.2018
Semilab, a leading supplier in metrology solutions for semiconductor manufacturing, today launched its EIR. The EIR addresses the FTIR market including EPI thickness and dopant monitoring, dielectric composition and Cs & Oi in wafer bulk. By combining Model Based Analysis and Absolute Reflectance Correction, EIR brings superior accuracy and reliability, and limits the amount of calibration needed during setting up the system. We are excited to bring a new tool with new capabilities to the market, which we believe will help our customers to simplify their calibration routine and improve overall long-term stability and reliability of those monitorings.
Facts
- FTIR is the method of choice for EPI thickness control
- Industry standard uses Igram analysis
- Igram analysis does not provide dopant information
- Igram analysis requires calibration for accurate measurement
Benefits
- 2 measurement modes:
- Optical Model Based Analysis, using modeling on IR spectrum
- Absolute reflectance (internal reference)
- Accuracy in thickness measurement
- Does not require calibration
- Can measure complex stack, transition layer & dopant concentration
- Interferogram analysis (Igram), using Igram side-burst
- Well adapted for thick EPI
- Requires calibration
- Current production baseline
- Fast, precise method
- Selective FFT (for complex side-burst)
- Optical Model Based Analysis, using modeling on IR spectrum
Figure 1. EIR-2200
About Semilab
We design, produce and sell metrology equipment for the characterization of semiconductor and photovoltaic materials, for monitoring the manufacturing process of semiconductor devices and solar cells, and also for R&D purposes in these areas. We offer a variety of measurement techniques; most of them are non-contact and non-destructive. Many of our technologies can be flexibly integrated into different platforms, ranging from simple handheld devices and table-top systems with high resolution mapping capability to fully automated stand-alone production control tools for mid-range and high-level fablines. We also offer in-line measurements for solar cell production lines.
Our strategy is to continuously improve our products, and to offer flexible solutions for our customers’ needs with high-value products for a reasonable price.