IGZO is one of the state-of-the-art active layer for display industry. However even today the fine tuning of the process requires very precise measurements in order to maintain the best layer properties.

Using Semilab’s µ-PCR and contact sheet resistance measurement one can map the panel with a reasonable speed which can show the improper settings of the layer deposition and set up the possibilities for further optimization

µ-PCR can determine a parameter (amplitude) which related to the device mobility, moreover other layer quality parameters (calculated from the microwave response decay curve) can be calculated as well.