In order to keep the thin film solar cell production stable, the adequate control of the layer deposition and treatment processes is crucial. Semilab offers several metrology solutions for the characterization of electrical and optical properties of the thin layers.
Our special design Four-Point-Probe and Eddy Current sensors provide accurate measurement of the sheet resistance of thin semiconductor, TCO or even metal layers in the total range of interest.
Using Semilab’s „Spectroscopic Ellipsometry” and „Spectroscopic Haze and Reflectance” techniques the complete characterization of the layer thickness and other optical parameters can be accomplished even on multilayer structures.
Visual inspection technology combines two key technologies and tools, the Spectroscopic Ellipsometer and IN-CORE Systèmes’ high-resolution image processing systems, 2D-3D line-scan camera based for defect detection and dimensional measurements of various surface characteristics. The platform was developed specifically for printed PV (organic and perovskite) applications.
The tool is designed to inspect and measure at highest precision on large area, 300 x 300 millimeter, flexible plastic or glass substrates, the new platform provides non-contact, fully automated defect detection and location. Furthermore the system provides advanced metrology capability which has been optimized for the OPV complex process, and is capable of analyzing single and multilayer structures.
Result evaluation is realized with help of Semilab software.
The SE series have a unique Modular Optical Platform including a spectroscopic ellipsometer with rotating compensator optics. The system has strong modular and versatile design, to answer needs from simple single layer thickness to more demanding applications such as those combining polarimetry, scatterometry and ellipsometry using Mueller matrix. It has a unique independent arm angle selection, and small spot size.
Printed Electronics. Optical & Electrical Metrology. Thin Film Coating characterization. Layer Thickness control.
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