Application

INLINE PROCESS CONTROL

 

Besides Semilab’s own automated wafer sorter platform, Semilab manufactures separate measurement units for integration into automated PV production lines. Semilab has been working together with all the relevant automation companies to integrate the measurement units.

The equipments cover a diverse range of metrology needs for comprehensive process and quality control in Si PV industry:

  • Incoming wafer inspection and process control during cell manufacturing
  • Measurement in as-cut wafer, textured, after diffusion, after passivation, after ARC deposition, after contact formation states
  • Measurements of geometrical, electrical and optical properties
  • Solutions for mono and multicrystalline silicon materials, Al-BSF, PERC, IBC and heterojunction cell concepts

All measurement units are designed considering the following directives:

  • Compatibility to state-of-the-art production lines
  • Supporting all the industry standard communication protocols
  • Flexible integration
  • Supporting both „on-the-fly” and „stop-and-go” data acquisition modes
  • Compact design
  • Simple integration and support
  • Simple maintenance, rare calibration periods
  • Application of noise reduction solutions
  • Simple and configurable customization of communication protocols

 

Technology

SINGLE-WAVE ELLIPSOMETRY

 

Laser ellipsometry measures a change in polarization as light reflects or transmits from a material structure. The polarization change is represented as an amplitude ratio, Ψ, and the phase difference, Δ. The measured response depends on optical properties and thickness of individual materials. Thus, ellipsometry is primarily used to determine film thickness and optical constants. However, it is also applied to characterize roughness and surface morphology by using scatter light measurement method.

 

FEATURES

  • Non-destructive
  • Non-Contact measurement method

Product Line

LE

Applications: tunnel oxide (thin SiO2 on Si), and poly-Si on SiO2/Si wafer structures monitoring

Products

LE-100IL

In-line Laser Ellipsometer for PV wafer coating measurement

Request Info