SE-3000

The Ideal thin Film characterization Tool for development & Pilot Line

The SE-3000 spectoscopic ellipsometer has been designed to fit the need of development and pilot line either for microelectronic, flat panels displays and coating industries. The SE-3000 is based on a GES5E; it can be mounted with two FOUP loadports, high speed stage, handling robot and a fast pre-alignment station for wafer to achieve equivalent throughput than production tools. The SE-3000 has the same characteristics than the GES5E in term of spectral range, Performances and spot size.

A top frame with Hepa Filter and a production type software can be added to the SE-3000.