LE-103PV

Laser Ellipsometer For Silicon Solar Cells

Compact, innovative equipment designed to measure the Thickness and Optical constants of Anti Reflective Coatings deposited on textured Silicon (mono-Si & multi-Si) substrates. Optimized angle of incidence (12-90°) can be easily achieved in order to obtain a maximum signal for thin films deposited on multicrystalline structured wafers. The pyramidal structure can be oriented to obtain correct measurements while sample is maintained securely in place.

Features and System specifications:

• Determines film thickness and optical constants (refractive index and extinction coefficient) for Anti Reflective coatings
• Integrated optics for stability and auto calibration
• Rotating compensator for measurements of Psi (0° - 90°) and Delta (0° - 360°) allows increased sensitivity and calculation of the depolarization caused by rough interfaces
• Microspot focusing optics for optimum signal collection.
• Specially adapted samples holder for cell sizes of 156×156 mm.
• IN LINE integration for rapid process control.
• Smart software PVECS compliant.
• Sample alignment: Maximum signal detection for manual tilt & height adjustment.
• Sample stage: 156 × 156 mm compatible
• Goniometer: 55° - 90° manual control