PLI-101/A, PLI-103/A
Photoluminescence tool for wafer and cell inspection
Inline photoluminescence tool is a fast and reliable solution for non-destructive measurement of wafer and cell quality at any stage of processing from as-cut wafers to finished cells.
Provides full control of material quality during the whole production.
Higher quality wafers create higher efficiency cells making the production more cost-efficient.
Features and System specifications:
- Fully automated inline photoluminescence imaging and inspection
- Reflection side photoluminescence on finished cells, processed and as-cut wafers
- On the fly lifetime calibration
- Quality description by calibrated lifetime map and custom classification parameters
- Sample size: PLI-101/A up to 156 mm
- PLI-103/A up to 162 mm
- High equivalent in-line throughput
Types of detectable defects:
PLI-101, PLI-103
Material:
- High dislocation density
- Cracks
- High contamination density
- Edge (corner) contaminations
- High vacancy density (for mono wafers)
- Low lifetime
PLI-101, PLI-103
Wiring:
- Shunt
- Edge isolation defect
- Bad finger
PLI-101A, PLI-103A
Passivation control (double side passivated samples)
- Optional on-the-fly Jo and iVoc mapping
We offer automated PLI-200 version as well.
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