µSE-2500

Microspot spectroscopic ellipsometer for patterned wafer applications.

Features and System specifications:

• DUV to Visible Ellipsometer in standard configuration
• Ellipsometer hardware: SE-RCE (rotating compensator) - high precision and accuracy
• Wavelength Range: 193 - 900 nm
• Measurable Box Size: 50 μm
• Fully automated characterization
• User friendly software SAM, compatible with SEMI® standard (E95-0200)
• Special designed optics for small spot
• CognexPatmax® Pattern recognition
• High accuracy automatic XYZ mapping stage
• Fast Omron Automatic focus
• Optical pre-aligner

Applications:

• Primary applications:
  • Front-end applications
  • Production wafer monitoring
  • Process development
• Advanced Process Control:
  • Across wafer uniformity
  • Wafer to wafer uniformity
  • Batch to batch uniformity

Options:

• Metrology options (additionally to the standard spectroscopic ellipsometry):
  • Spectroscopic reflectometry (SR)
  • Photoluminescence (PL)
  • Raman spectroscopy
• Loading:
  • 150/200 mm or 200/300 mm compatibility
  • FOUP, SMIF and/or open cassette configuration