SE-2100

Printed Electronics. Optical & Electrical Metrology. Thin Film Coating characterization. Layer Thickness control.

Features and System specification:

• Capable for Fast and accurate measurement on square samples up to 350x450 mm or wafers up to 300 mm
• Special design of the chuck to hold Flexible Sample
• Active Vibration damping
• High-resolution mapping stage
• Fast Omron autofocus
• Vertical camera for samples visualisation & Pattern recognition
• Joystick to move the sample easily
• CE and SEMI standards compliant

Components & Options:

• Spectroscopic Ellipsometer:
  • Fast acquisition directly on the foil
  • Measurement Spot adapted for Plastic substrate
• Spectroscopic Reflectometer:
  • For reflection and transmission of the films
• Non-contact Sheet resistance:
  • Fast and accurate Sheet resistance by Eddy Current
  • For Transparent electrode and Metal
• Other measurement technique like Raman, Lifetime...etc

Applications:

• Display: TFT, OLED on Glass or Flexible substrate
• Lighting: New OLED Lighting application. White OLED
• Printed Electronics: Any process on flexible substrate (transistor, sensors, etc.)
• Photovoltaics: Small Thin Films PV panels, TCO panels