SPL-2200/2500

SPL-2200/2500 is a non-contact, non-destructive, spectroscopy-based measurement system to probe the electronic structure of different materials.

Features and System specifications:

• Wafer size: 150/200 – 300 mm
• Two Load Ports (FOUP/SMIF)
• Fixed entrance slit and fixed spectral range for the spectrographs
• High performance grating
• High performance detectors
• Fast automatic focus (with distance sensor)
• High speed x,y,z stage
• Automated measurement and analysis
• Windows® 10 operating system for multi-tasking
• SAM™ user interface compliant to SEMI® standard (E95-0200)