Semilab offers various solutions to analyze semiconductor samples. These are all aimed to give as much information on the subject as possible to help people understand the sources of the behavior and properties of their samples and the effects of the used processes.

Using the state-of-the-art Deep Level Transient Spectroscopy (DLTS) setup of the Semilab DLS-1100, it is possible to perform qualitative and quantile analysis of the electrically active impurities and defects in the semiconductor, although this is a destructive technique. This method provides information about the activation energy of the impurity and capture cross section. It also allows to the detection of concentration impurities down to 5×107 atoms/cmdepending on the doping concentration.

Figure 1. Contamination analysis