Application

CONTAMINATION ANALYSIS

 

Semilab offers various solutions to analyze semiconductor samples. These are all aimed to give as much information on the subject as possible to help people understand the sources of the behavior and properties of their samples and the effects of the used processes.

Using the state-of-the-art Deep Level Transient Spectroscopy (DLTS) setup of the Semilab DLS-1000, it is possible to perform qualitative and quantile analysis of the electrically active impurities in the semiconductor, although this is a destructive technique. This method provides information about the activation energy of the impurity and cross-section capture. It also allows the detection of concentration impurities down to 2×108 atoms/cm3,depending on the doping concertation.

Figure 1. Contamination analysis

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