SEMILAB provides state-of-the-art metrology solutions for semiconductor device manufacturers, both in-line and R&D segments, and is a strategic metrology supplier of leading wafer manufacturers, IC device makers in the More-than-Moore market segment, solar and display industries worldwide.
We cover the entire R&D lifecycle of product innovation, ranging from innovative research, measurement development, product design and manufacturing to implementation, integration, and maintenance. With our 47 product lines and our 214 unique products, our growing portfolio offers a variety of metrology solutions based on optical and electrical measurement technologies, thin film applications, and automation developments based on customer requirements, from manual operation to complete and factory scale automation.
With our 1600 employees worldwide, together we participate in the entire manufacturing process of the measuring instruments from the first spark of idea to the last test-run before delivering the product over to the customer. Through the expertise of our 200+ physicists, 500+ engineers and 70+ software developers we are able to develop our measurement techniques based on deep understanding of the key processes and requirements of microelectronics production and provide state-of-the-art metrology solutions to our industry partners and customers, leading to more efficient production and control, while guaranteeing the highest-level user experience possible.

 

Semilab was founded by a team of scientists in 1989 as a spin-off company from the Research Institute for Technical Physics of the Hungarian Academy of Sciences. Historically, our first product was the DLTS, and the first carrier lifetime mapper was shipped in 1991. Since then, we have expanded our portfolio with electrical and optical measurement technologies, and our company has grown substantially: we have significant global market share in the area of semiconductor metrology equipment, electrical metrology for solar cell manufacturing and in the display industry.
We accomplished this through an extensive amount of own R&D work and by acquiring suitable assets and technologies. Semitest Inc. and its technologies for dielectric metrology and epi layer testing were acquired first in 2004, and we have continued to develop and sell the products ever since. Following that, in 2008, jointed Sopra, producer of the first commercially available spectroscopic ellipsometers in the world, with its exclusive license covering the technique of ellipsometry-porosimetry. Thanks to our strong R&D base and the Sopra legacy, the spectroscopic ellipsometers are now one of the key product families of Semilab. The same year SSM Inc. and QC Solutions joined Semilab as well, delivering its contact and non-contact methods for epi layer, dielectric and implant characterization, and high-frequency ac-SPV metrology for epi layers and implants to the Semilab portfolio. Advanced Metrology Systems (AMS) joined in 2009, providing high-end technologies such as model-based infrared reflectometry for 3D structure characterization and surface acoustic wave measurements for metal and low-k layers. Semiconductor Diagnostics Inc. (SDI) also merged with Semilab, bringing the cutting-edge SPV measurements for diffusion length determination and contamination monitoring down to levels as low as 1E8 iron atoms per cubic centimeter, as well as allowing for micro-sized corona charging and Kelvin probe for on-product dielectric characterization. Technology licensing and acquisitions include ion implant monitoring methods from IBM and Applied Materials, solar cell inspection methods from Basler and more. In the 2010’s, the joining of the Danish DME, Fischer-Cripps Laboratories and SemiMap supplied key metrology solutions, like AFM, Nanoindentation and resistivity mapping.
We are proud of the fact that through uniting the expertise listed above, Semilab now delivers essential technologies, continuous progress, and shows excellence in semiconductor metrology through its high-quality, versatile product portfolio.

 

Semilab is one of the key suppliers of metrology and inspection equipment for the semiconductor industry, based in Budapest, Hungary. We have R&D and product centers around the world, including the USA, Germany and China, and direct sales and service offices in all the major markets, including the USA, Japan, Korea, China, Taiwan and Singapore. 
Our customer-centric global support enables close collaboration with industry partners to understand and fulfill the requirements of the latest manufacturing and quality control processes of the microelectronics industry in order to serve customer satisfaction and enabling a smarter future.