Application

SI WAFER SORTING

 

Sorter applications provide advanced multiparameter wafer inspection with integrated high speed sorting for quality control of production PV wafers. Owing to wide range automation module portfolio and flexible combined Semilab’s metrology modules, all customer can find perfect configuration what fulfil their production expectations.

Application area:

  • Outgoing wafer inspection for wafer manufacturers
  • Incoming as-cut wafer inspection for solar cell manufacturers

Sorter purpose

  • Eliminating damaged wafers from further process
  • Eliminating high thickness variation wafers (TTV, saw mark)
  • Sorting of potentially weak wafers (microcracks) which could break in subsequent process steps
  • Sorting based on resistivity, and lifetime values
  • Sorting of wafers with dislocations, high contamination and vacancy density
  • Wafer input: loading from cassettes or stack
  • Wafer output: Sorting in different user-defined classes, collection in coin stacks
  • High throughput

 

Technology

SURFACE-CONTAMINATION AND CHIPPING INSPECTION

 

The WSI module is an Imaging and image processing system, which can inspect the following defects:

  • Contamination (length, width, area and count of the defects)
  • Chipping (length, width, area and count of the defects)
  • Edge-defect (length, width, area and count of the defects)
  • Grain density
    • Largest single- and micro-grain area
    • Total single- and micro-grain area

Theory of WSI imaging: On-the-fly process where the wafer passes through between the line cameras and different type of illuminations. The system is using two illuminating systems on each side.

  • Diffuse lighting for stain detection
  • Focused lighting for chipping and edge-defect detection and for micro-grain and single-grain area measurement

Contamination example

Contamination example

 


Chipping example

 

                                    Edge-defect example

Grain density example

Grain density example

 

FEATURES

  • Diffuse lighting for contamination and stain detection
  • Focused lighting for chipping and edge-defect detection
  • Focused lighting for micro-grain and single-grain area measurement
  • Line cameras take the pictures in four components
  • Edge detection of the wafers
  • Investigation of the wafer along the edges to detect bright spots for chippings and dark spots for edge-defects of the wafers
  • Defect selection based on the size criteria
  • Central region investigation for dark spots (contaminations)
  • Blob search to merge the spots

 

Product Line

PVS

The PVS product line provides advanced multi-parameter wafer inspection with integrated high speed sorting for quality control of production wafers. It eliminates imperfect substrates, maximize cell line output and ensures optimized efficiency.

It combines high reliability wafer handling with Semilab’s industry leading PV metrology, to provide a turnkey solution for sorting of incoming wafers. This is backed by direct expert support from the OEM metrology manufacturer, through our worldwide network of branch offices.

Products

PVS-6000

PVS-6000 is a High Speed, field proven PV Wafer Inspection and Sorting System with 5400 wafer per hour throughput. It combines high reliability wafer handling with Semilab’s industry leading PV metrology, to provide a turnkey solution for sorting of incoming wafers. This is backed by direct expert support from the OEM metrology manufacturer, through our worldwide network of branch offices.

Loaders:

  • PVLS-5400        Automated stack loader with 3 position pick-and-place system. Up to 2400 pcs buffered wafer in 12 pcs carrier.
  • PVLC-3600       Automated cassette loaders for 25/50/100 slot cassettes
  • PVLC-3600-AL   Fully automated production line loader for 100 slot cassettes

Metrologies:

Unloaders:

  • PVULS-5406T   High speed stack unloader with 6 bin
  • PVULS-5407T   High speed multilevel stack unloader with 7 bin

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