Application
SI WAFER SORTING
Sorter applications provide advanced multiparameter wafer inspection with integrated high speed sorting for quality control of production PV wafers. Owing to wide range automation module portfolio and flexible combined Semilab’s metrology modules, all customer can find perfect configuration what fulfil their production expectations.
Application area:
- Outgoing wafer inspection for wafer manufacturers
- Incoming as-cut wafer inspection for solar cell manufacturers
Sorter purpose
- Eliminating damaged wafers from further process
- Eliminating high thickness variation wafers (TTV, saw mark)
- Sorting of potentially weak wafers (microcracks) which could break in subsequent process steps
- Sorting based on resistivity, and lifetime values
- Sorting of wafers with dislocations, high contamination and vacancy density
- Wafer input: loading from cassettes or stack
- Wafer output: Sorting in different user-defined classes, collection in coin stacks
- High throughput
Technology
SAW MARK INSPECTION
For thickness measurement in the wafer sorting process is used the TTR (Thickness, Topology, Resistivity) module, based on this measurement is obtained the saw mark size. The displacement laser sensors measure the distances between the wafer surfaces and the sensors (x1 and x2) from the amount of diffuse reflected light. By using the obtained line scans wafer thickness and saw mark values are calculated.
The tool measures line scans parallel to the belt direction:
- 6 saw mark line scans (3 on the top, 3 on the bottom)
- 3 thickness line scans
- 1 resistivity line scan
Position of the line scans:
FEATURES
- Non-contact, non-destructive measurement method
Product Line
PVS
The PVS product line provides advanced multi-parameter wafer inspection with integrated high speed sorting for quality control of production wafers. It eliminates imperfect substrates, maximize cell line output and ensures optimized efficiency.
It combines high reliability wafer handling with Semilab’s industry leading PV metrology, to provide a turnkey solution for sorting of incoming wafers. This is backed by direct expert support from the OEM metrology manufacturer, through our worldwide network of branch offices.
Products
PVS-5100
PVS-5100 is a high throughput, field proven PV Wafer Inspection and Sorting System.
It combines high reliability wafer handling with Semilab’s industry leading PV metrology, to provide a turnkey solution for sorting of incoming wafers. This is backed by direct expert support from the OEM metrology manufacturer, through our worldwide network of branch offices.
Loaders
- PVLS-5400 Automated stack loader with 3 position pick-and-place system. Up to 2400 pcs buffered wafer in 12 pcs carrier.
- PVLC-3600* Automated cassette loaders for 25/50/100 slot cassettes
- PVLC-3600-AL Fully automated production line loader for 100 slot cassettes
Metrologies
- PLI-101/3 Photoluminescence imaging
- WML-1 Minority carrier lifetime measurement
- SHP-200 2D measurement
- MCI-150 Micro crack inspection
- WSI-120 Surface chipping and contamination inspection
- TTR-300 Thickness, resistivity measurement
- TTR-300 Saw mark Inspection
Unloaders
- PVULS-5406T High speed stack unloader with 6 bin
- PVULS-5407T High speed multilevel stack unloader with 7 bin
PVS-6000
PVS-6000 is a High Speed, field proven PV Wafer Inspection and Sorting System with 5400 wafer per hour throughput. It combines high reliability wafer handling with Semilab’s industry leading PV metrology, to provide a turnkey solution for sorting of incoming wafers. This is backed by direct expert support from the OEM metrology manufacturer, through our worldwide network of branch offices.
Loaders:
- PVLS-5400 Automated stack loader with 3 position pick-and-place system. Up to 2400 pcs buffered wafer in 12 pcs carrier.
- PVLC-3600 Automated cassette loaders for 25/50/100 slot cassettes
- PVLC-3600-AL Fully automated production line loader for 100 slot cassettes
Metrologies:
- PLI-101/3 Photoluminescence imaging
- WML-1 Minority carrier lifetime measurement
- SHP-200 2D measurement
- MCI-150 Micro crack inspection
- WSI-120 Surface chipping and contamination inspection
- TTR-300 Thickness, resistivity measurement
- TTR-300 Sawmark Inspection
Unloaders:
- PVULS-5406T High speed stack unloader with 6 bin
- PVULS-5407T High speed multilevel stack unloader with 7 bin