MCV-2200, MCV-2500, MCV-3000, MCV-3000P
The MCV automatic mapping systems provide a Mercury C-V measurement for non-patterned wafers used in epitaxial silicon production and front-end semiconductor processing.
In MCV-2200, MCV-2500 and MCV-3000/3000P the wafers are robotically loaded onto the mapping stage from an open cassette or FOUP. The test wafer moves to each site specified in a pre-programmed map as electrical characterization tests are made. The system stores test data and reports them in a variety of formats.
Optional features:
- ID reader (front or back, even in case of transparent samples like SiC, GaN)
- SECS/GEM host communication
- Pre-treatment chamber option
- Can be configured with 300 mm FOUP, 200 mm SMIF or open cassette
Wafer sizes:
- Automatic wafer handling:
- MCV-2200: from 100 mm to 200 mm
- MCV-2500: from 200 mm to 300 mm
- MCV-3000/3000P: 200 mm or 300 mm
- Manual wafer handling:
- Full wafers:
- MCV-2200: from 50 mm to 200 mm
- MCV-2500: from 50 mm to 300 mm
- Coupon samples or fractions:
- minimum sample size is 40 mm × 40 mm
- Full wafers: