QC-series

Semilab’s QC platforms (Near Surface Doping Mappers) for epitaxial monitoring are the only non-contact, non-destructive, high throughput systems that can reliably map near surface doping on process wafers.

Features:

• Integrated universal (for both p- and n-type) UV/Corona pre-treatment with improved and optimized UV oxidation for up-to 300 mm wafers and accurate feedback loop controlled corona charging technique with new mechanical and electronics design and new corona system.
• New sensor design insensitive to wafer/chuck flatness.
• Rapidity of even full wafer mapping measurements ensures an impressive throughput and the ability to monitor and control the epitaxial process
• Improved new software has multiple benefits, such as: highly configurable, multitasking, real-time data monitoring, simplified recipe generation, job queuing and fully 300mm SECS/GEM complaint.
• Wafer motion stage with precise positioning
• Detects problems that may escape other metrology techniques, because of the strong surface sensitivity
• Qualifies Epi layer within the critical device region of IC
• Provides near-surface carrier lifetime as an indicator of wafer contamination
• Fast full wafer mapping capability
• Measures all doping combinations: n/p, n/n, p/n, p/p