MCV-530, MCV-530L

The MCV-530 system is designed for the fast and reliable testing of dielectric and epitaxial layers by mercury probe, and it is ideal for R&D or small volume production.

MCV-530/530L systems are manual loading measurement equipments, however they have the same measurement abilities like the automatic MCV-2200/2500 products.

Wafer sizes:

Manual wafer handling:

• Full wafers:
  • MCV-530L: from 50 mm to 200 mm
  • MCV-530: from 50 mm to 300 mm
• Coupon samples or fractions:
  • minimum sample size is 40 mm × 40 mm