PLI-1001/A, PLI-1003/A

PLI-1001/A, PLI-1003/A

Photoluminescence tool for wafer and cell inspection

Inline photoluminescence tool is a fast and reliable solution for non-destructive measurement of wafer and cell quality at any stage of processing from as-cut wafers to finished cells.
Provides full control of material quality during the whole production.
Higher quality wafers create higher efficiency cells making the production more cost-efficient.

Features and System specifications:

  • Fully automated inline photoluminescence imaging and inspection
  • Reflection side photoluminescence on finished cells, processed and as-cut wafers
  • On the fly lifetime calibration
  • Quality description by calibrated lifetime map and custom classification parameters
  • Sample size: PLI-1001/A up to 156 mm
                           PLI-1003/A up to 162 mm

 

Types of detectable defects:

PLI-1001, PLI-1003

Material:

  • High dislocation density
  • Cracks
  • High contamination density
  • Edge (corner) contaminations
  • High vacancy density (for mono wafers)
  • Low lifetime

PLI-1001, PLI-1003

Wiring:

  • Shunt
  • Edge isolation defect
  • Bad finger

PLI-1001A, PLI-1003A

Passivation coltrol (double side passivated samples)

  • Optional on-the-fly Jo and iVoc mapping

Request Info

Technology

PHOTOLUMINESCENCE IMAGING