In-situ AFM solution is combined with scanning electron microscope (SEM) or focused ion beam-SEM (FIB-SEM) in a single equipment.

Reliable performance provided by:

  • SEM guided positioning of AFM tip to area of interest
  • Anchored stage technology for ultra high stability and low drift
  • In-chamber integration for simultaneous AFM and SEM imaging
  • The system is controlled by the C26-Controller of Semilab and the Scan-Software ScanTool™

Ease of use:

  • One software interface to operate AFM and SEM
  • Automated laser and detector alignment

Flexibility in components:

  • Sample scanner setup with 9 µm or 25 µm scan range
  • Sample size up to 10 mm


  • All commercial cantilevers compatible
  • Capable of performing all the commercially available scanning probe microscopy (SPM) modes: 
    DC mode, AC mode, Magnetic Force Microscopy (MFM), Kelvin Probe Force Microscopy (KPFM), Scanning Capacitance Microscopy (SCM), Electrostatic Force Microscopy (EFM), Scanning Tunneling Microscopy (STM), Scanning Spreading Resistance Microscopy (SSRM), Lithography
  • Sample Transfer Shuttle

Request Info