SEM-AFM
In-situ AFM solution is combined with scanning electron microscope (SEM) or focused ion beam-SEM (FIB-SEM) in a single equipment.
Reliable performance provided by:
- SEM guided positioning of AFM tip to area of interest
- Anchored stage technology for ultra high stability and low drift
- In-chamber integration for simultaneous AFM and SEM imaging
- The system is controlled by the C26-Controller of Semilab and the Scan-Software ScanTool™
Ease of use:
- One software interface to operate AFM and SEM
- Automated laser and detector alignment
Flexibility in components:
- Sample scanner setup with 9 µm or 25 µm scan range
- Sample size up to 10 mm
Versatility:
- All commercial cantilevers compatible
- Capable of performing all the commercially available scanning probe microscopy (SPM) modes:
DC mode, AC mode, Magnetic Force Microscopy (MFM), Kelvin Probe Force Microscopy (KPFM), Scanning Capacitance Microscopy (SCM), Electrostatic Force Microscopy (EFM), Scanning Tunneling Microscopy (STM), Scanning Spreading Resistance Microscopy (SSRM), Lithography - Sample Transfer Shuttle