New product release: Semilab resistivity tester addresses Rs IC Fab market
10.19.2017
We are pleased to present Semilab’s new generation sheet resistance measurement tools, combining 4PP with non-contact measurement techniques in a range of platforms from the cost-effective, low automation platform (WT) to full SEMI standard compliant platforms (RT). In addition to the more conventional 4PP, non-contact measurement can be applied to BEOL (metal layers thickness) using EDDY or to FEOL (implant monitoring) using JPV.
Features:
- 4PP is an established, time-proven technique with several limitations:
- Limited range for each 4PP leading to regular probe change
- Accuracy is time-dependent due to wear of the probesrobe
- Long-term stability is jeopardized by the lifetime of the probes
Benefits:
- 1-4 permanent 4PP heads
- Different ranges & applications
- Lower CoO
- Combining non-contact probes:
- Reduced PM and calibration
- Better long-term stability
- Fast / high resolution mapping
Figure 1. RT-3000 and RT-2500
Figure 2. WT-2000
About Semilab
We design, produce and sell metrology equipment for the characterization of semiconductor and photovoltaic materials, for monitoring the manufacturing process of semiconductor devices and solar cells, and also for R&D purposes in these areas. We offer a variety of measurement techniques; most of them are non-contact and non-destructive. Many of our technologies can be flexibly integrated into different platforms, ranging from simple handheld devices and table-top systems with high resolution mapping capability to fully automated stand-alone production control tools for mid-range and high-level fablines. We also offer in-line measurements for solar cell production lines.
Our strategy is to continuously improve our products, and to offer flexible solutions for our customers’ needs with high-value products for a reasonable price.