RT-110
The Resistivity Tester is a non-contact bulk resistivity measurement tool for rapid classification of silicon wafers. It operates via eddy current technology.
The RT-110 resistivity tester is suitable for measurement of the resistivity and thickness of bare semiconductor wafers. The wafer handling is manual, the measurement starts automatically. The RT-110 can measure in 4 different resistivity ranges. Conductivity type determination is possible by the built-in P/N tester.
Features and System specifications:
- Resistivity range 0.01-20 Ωcm
- Computer controlled operation
- No sample preparation
- Measurement time about 1s (excluding handling)
- Manual wafer loading
Options:
- Wafer Thickness Measurement in the range of 200 to 1000 µm
- Probe for P/N conductivity type testing