The WT-2000P is a high-throughput inline measurement tool for monitoring quality of silicon blocks by measuring Carrier recombination lifetime and resistivity. The system provides fast, non-contact measurements (single-point, line scans and/or maps) on silicon blocks in size up to 210x210x500mm. It has manual and automatic measurement modes and manual and automatic (transport belt) block loading capabilities. WT-2000P provides advanced automation capabilities.
Carrier recombination lifetime is a primary quality control parameter for multi-crystalline silicon blocks. The measurement is based on µ-PCD technique.
Resistivity is measured based on eddy current technique.