FAaST 300-SL

The FAaST 300 SL system is the cutting-edge non-contact electrical metrology system that combines both of Semilab SDI’s patented Micro and Macro corona-Kelvin methods into a single platform designed to support advanced R&D as well as the most demanding high-volume manufacturing environment. 

Features and System specifications:

  • Automatic robotic wafer handling
  • Dual FOUP Loadport; optional configuration with single Loadport or including Versaport
  • Suitable for patterned wafer (Micro) and monitor wafer (Macro) measurements
  • Semilab SDI patented high resolution (10µm) Micro corona-Kelvin based on Kelvin Probe Force Microscopy (KPFM) for measurement of dielectric and interface properties in Scribe Line test sites (down to 40µm x 40µm) and active device regions
  • Advanced 2 step Non-Visual Defect (NVD) Inspection that combines full wafer Macro surface voltage imaging and focused high resolution intra-die surface voltage imaging using KPFM
  • Automatic programmable sites or contour mapping of dielectric properties including:
    • Dielectric Capacitance (CD) and Thickness (EOT),
    • Dielectric Leakage Current (I-V)
    • Flatband Voltage (Vfb),
    • Interface Trap Density (Dit),
    • Interface Trapped Charge (Qit),
    • Semiconductor Surface Barrier (Vsb),
    • Oxide Total Charge (Qtot),
    • Mobile Ionic Charge (Qm), among others
  • FAaST software package; including Measurement, Recipe Writing and Data Viewing applications
  • Suitable for measurement on: semiconductors (e.g. Si, SiGe, InGaAs, SiC, GaN) with high-k and low-k dielectric films (e.g. SiO2, SiNx, Al2O3, HfO2 ; mixed dielectrics and dielectric film stacks)
  • Default configuration for 300mm wafers; with option for 200mm/300mm bridge configuration
  • Line Conditioner with flexible compatibility
  • Compatible for configuration with other Semilab SDI FAaST tool measurement technologies
  • Additional available options include: Mini-environment, 300mm Semi compliant Automation, Seismic brackets, wafer OCR, RFID, cassette barcode reader, 1000V Vcpd measurement range

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