LEI-1510EC-RP, LEI-1510EC-RS

The LEI-1510 family allows for the best support of high volume manufacturing when paired with a robotic cabinet.

The RP is robotically loaded and accommodates either 50-150 mm or 76-200 mm wafers (option chosen at system build). This system picks and places from a single cassette stand.

The RS expands capability for sorting wafers with a second stand that allows for binning of product into two categories.