ACV-2200, ACV-3000,
ACV-3100 NON-CONTACT
RESISTIVITY
PROFILING SYSTEMS

• AIR-GAP CV PROFILING

AFM-1000

• SCANNING PROBE MICROSCOPY (SPM) FOR R&D
• SCANNING PROBE MICROSCOPY (SPM) OF 3D STRUCTURES
• SCANNING PROBE MICROSCOPY (SPM) FOR DEFECT CHARACTERIZATION
• SCANNING PROBE MICROSCOPY (SPM) FOR NANO SURFACES

AFM-2100 ATOMIC
FORCE MICROSCOPE

• SCANNING PROBE MICROSCOPY (SPM) FOR R&D
• SCANNING PROBE MICROSCOPY (SPM) OF 3D STRUCTURES
• SCANNING PROBE MICROSCOPY (SPM) FOR DEFECT CHARACTERIZATION
• SCANNING PROBE MICROSCOPY (SPM) FOR NANO SURFACES

AFM-2200 ATOMIC
FORCE MICROSCOPE

• SCANNING PROBE MICROSCOPY (SPM) OF 3D STRUCTURES
• SCANNING PROBE MICROSCOPY (SPM) FOR DEFECT CHARACTERIZATION
• SCANNING PROBE MICROSCOPY (SPM) FOR NANO SURFACES

AFM-3000

• SCANNING PROBE MICROSCOPY (SPM) FOR DEFECT CHARACTERIZATION
• SCANNING PROBE MICROSCOPY (SPM) OF 3D STRUCTURES
• SCANNING PROBE MICROSCOPY (SPM) FOR NANO SURFACES
• Atomic Force Microscopy (AFM) for Surface Roughness

CMS, CLS

• SHEET RESISTANCE MEASUREMENT

COREMA-2000
CONTACTLESS
RESISTIVITY MAPPER

• Resistivity measurement for semi-insulators

CRYOSTATS FOR
SEMILAB DLS SYSTEMS

• DEEP LEVEL TRANSIENT SPECTROSCOPY - PV
• DEEP LEVEL TRANSIENT SPECTROSCOPY

DLS-1000 DEEP LEVEL
TRANSIENT
SPECTROMETER

DLS-1100 DEEP LEVEL
TRANSIENT
SPECTROMETER

• DEEP LEVEL TRANSIENT SPECTROSCOPY - PV
• DEEP LEVEL TRANSIENT SPECTROSCOPY

DLS-83D DEEP LEVEL
TRANSIENT
SPECTROMETER

• DEEP LEVEL TRANSIENT SPECTROSCOPY - PV
• DEEP LEVEL TRANSIENT SPECTROSCOPY

EIR-2200 ENHANCED
INFRARED
REFLECTOMETER

EIR-2201 ENHANCED
INFRARED
REFLECTOMETER

• FTIR REFLECTOMETRY

EIR-2500

EIR-3000 ENHANCED
INFRARED
REFLECTOMETER

• FTIR REFLECTOMETRY
• FTIR Spectroscopy for Layer Composition

EN-VISION-3000

• EN-VISION

FPP-1000

• FOUR POINT PROBE SHEET RESISTANCE
• FOUR POINT PROBE SHEET RESISTANCE

IND-1000 TABLETOP
NANOINDENTATION
BASIC SYSTEM

• NANOINDENTATION FOR R&D

IND-1500
NANOINDENTATION
ADVANCED SYSTEM

• NANOINDENTATION FOR R&D
• NANOINDENTATION FOR HYBRID BONDING STRENGTH MEASUREMENT (ADVANCED PACKAGING)

LSL-2500

• LOW-ANGLE LIGHT SCATTERING TOMOGRAPHY

LST-2500HD LIGHT
SCATTERING TOMOGRAPH
HIGH DYNAMIC-RANGE
SYSTEM

• LIGHT SCATTERING TOMOGRAPHY

MBD-2300 MODEL-BASED
DIMENSIONS

• SPECTROSCOPIC ELLIPSOMETRY for Semi

MBM-2201 NON-CONTACT
MOBILITY AND SHEET
RESISTANCE METROLOGY
SYSTEM

• NON-CONTACT MOBILITY BY MICROWAVE REFLECTANCE

MCV-3000S FACEDOWN
MERCURY C-V
METROLOGY SYSTEM

• MERCURY C-V PROFILING
• MERCURY C-V PROFILING
• MERCURY CV PROFILING

PDL-1000

• HIGH-SENSIVITY PARALLEL DIPOLE LINE (PDL) HALL MEASUREMENT

PLB-55
PHOTOLUMINESCENCE
SILICON BLOCK
IMAGING SYSTEM

• INFRARED BLOCK IMAGING
• BLOCKS' PHOTOLUMINESCENCE IMAGING

PLB-55I SILICON
BLOCK SCANNER

• INFRARED BLOCK IMAGING

PLB-55R INGOT STRESS
INSPECTION SYSTEM

• INFRARED BLOCK IMAGING

PLI-1001/A,
PLI-1003/A

• PHOTOLUMINESCENCE IMAGING

PLI-101/A, PLI-103/A

• PHOTOLUMINESCENCE IMAGING

PMR-2200C ION
IMPLANT DOSE MONITOR

• PHOTO-MODULATED REFLECTIVITY MEASUREMENT

PMR-2200S ION
IMPLANT DOSE MONITOR
S

• PHOTO-MODULATED REFLECTIVITY MEASUREMENT

PMR-3000S ION
IMPLANT DOSE MONITOR
S

• PHOTO-MODULATED REFLECTIVITY MEASUREMENT

PN-100

• P/N TYPE DETERMINATION

PSI-2200

• POLARIZED INFRARED IMAGING

PSI-3000 POLARIZED
STRESS IMAGING
SYSTEM

• POLARIZED INFRARED IMAGING

PVS-5000

• MICROCRACK INSPECTION
• PHOTOLUMINESCENCE IMAGING
• THICKNESS AND RESISTIVITY MEASUREMENT

PVS-5100

• µ-PCD CARRIER LIFETIME FOR WAFERS
• GEOMETRY INSPECTION
• SAW MARK INSPECTION

PVS-6000

• µ-PCD CARRIER LIFETIME FOR WAFERS
• GEOMETRY INSPECTION
• SAW MARK INSPECTION

PVS-6000

• MICROCRACK INSPECTION
• PHOTOLUMINESCENCE IMAGING
• THICKNESS AND RESISTIVITY MEASUREMENT
• SURFACE-CONTAMINATION AND CHIPPING INSPECTION

RT-1000

• BULK RESISTIVITY MEASUREMENT

RT-110

• BULK RESISTIVITY MEASUREMENT

RT-2201, RT-2500,
RT-3000 SHEET
RESISTANCE METROLOGY
SYSTEMS

• SHEET RESISTANCE MEASUREMENT

RT-2500, RT-3000

SCI 1-6

• COLOR MEASUREMENT FOR CELLS

SHR-1000

• SHEET RESISTANCE MEASUREMENT

SIRM-2100,
SIRM-2500, SIRM-3000

SPL-2100

SPL-2200 & SPL-3000

• SPECTRAL PHOTOLUMINESCENCE MEASUREMENT

SRP-170 SPREADING
RESISTANCE PROFILER

• SPREADING RESISTANCE PROFILING

SRP-2100 SPREADING
RESISTANCE PROFILER

• SPREADING RESISTANCE PROFILING

SRP-2100I SPREADING
RESISTANCE PROFILER
WITH I-V CAPABILITY

• SPREADING RESISTANCE PROFILING

TTR-300

• THICKNESS AND RESISTIVITY MEASUREMENT

WG-2201

• GEOMETRY INSPECTION
• Capacitive Distance Sensing for bow/warp, wafer thickness

WG-2202

• GEOMETRY INSPECTION
• Capacitive Distance Sensing for bow/warp, wafer thickness

WG-2500

• GEOMETRY INSPECTION

WMT, WLT

• THICKNESS AND RESISTIVITY MEASUREMENT

WT-1200 & WT-1200B

• CARRIER LIFETIME (µ-PCD, QSS-µPCD)

WT-1200A

• CARRIER LIFETIME (µ-PCD, QSS-µPCD)
• QUASI STEADY STATE -µPCD

WT-1200I

WT-1200IL

• E-PCD CARRIER LIFETIME FOR MONO-Si

WT-2000

• TCO SHEET RESISTANCE
• MINORITY CARRIER LIFETIME MEASUREMENT
• MINORITY CARRIER DIFFUSION LENGTH MEASUREMENT

WT-2000 / 2A

• MINORITY CARRIER DIFFUSION LENGTH MEASUREMENT

WT-2000 PL

WT-2000 WAFER TESTER
- TABLETOP SYSTEM

• FOUR POINT PROBE SHEET RESISTANCE
• FOUR POINT PROBE SHEET RESISTANCE

WT-2000 WAFER TESTER
- TABLETOP SYSTEM

• SHEET RESISTANCE MEASUREMENT

WT-2000MCT

• MINORITY CARRIER LIFETIME MEASUREMENT

WT-2000P

• CARRIER LIFETIME (µ-PCD, QSS-µPCD)

WT-2000PI

WT-2000PVN

• FOUR POINT PROBE SHEET RESISTANCE
• SHEET RESISTANCE MEASUREMENT
• BULK RESISTIVITY MEASUREMENT

WT-2000PVN

• CARRIER LIFETIME (µ-PCD, QSS-µPCD)
• LIGHT BEAM INDUCED CURRENT

WT-2010D

• CARRIER LIFETIME (µ-PCD, QSS-µPCD)
• µ-PCD CARRIER LIFETIME FOR MULTI-Si

WT-2200, WT-2500,
WT-3000

• MINORITY CARRIER LIFETIME MEASUREMENT

WXL

• CARRIER LIFETIME (µ-PCD, QSS-µPCD)

µSE / SE-2200
MICROSPOT
SPECTROSCOPIC
ELLIPSOMETER

• SPECTROSCOPIC ELLIPSOMETRY for Semi
• Spectroscopic Ellipsometry & Reflectometry for Thin Film Thickness

µSE / SE-3000
MICROSPOT
SPECTROSCOPIC
ELLIPSOMETER

• SPECTROSCOPIC ELLIPSOMETRY for Semi
• Spectroscopic Ellipsometry & Reflectometry for Thin Film Thickness

µSE-2300 MICROSPOT
SPECTROSCOPIC
ELLIPSOMETER

• SPECTROSCOPIC ELLIPSOMETRY for Semi